Inventor · disambiguated record
Xiaoyuan Hu
Also filed as: HU XIAOYUAN · HU XIAOYUAN S · HU XIAOYUAN SANDRA
4 granted patents·5 pending applications·16 citations·filing 2005–2022
66Inventor score
Top patents by PatentIndex Score
9 records- 0189US8814631B2Tracking spectrum features in two dimensions for endpoint detectionDAVID JEFFREY DRUE·Filed 2011·Granted Aug 26, 2014·13 cites·15 claims
- 0267US8892568B2Building a library of spectra for optical monitoringDAVID JEFFREY DRUE·Filed 2011·Granted Nov 18, 2014·2 cites·20 claims
- 0361US8942842B2Varying optical coefficients to generate spectra for polishing controlDAVID JEFFREY DRUE·Filed 2011·Granted Jan 27, 2015·1 cites·22 claims
- 0447US12492087B2Underground container logistics loading and unloading system based on deep underground passageUNIV SHANGHAI MARITIME·Filed 2022·Granted Dec 9, 2025·0 cites·2 claims
- 0542US2006177815A1Dielectrophoretic particle sorterUNIV CALIFORNIA·Filed 2005·Application pending·0 cites
- 0640US2012278028A1Generating model based spectra library for polishingDAVID JEFFREY DRUE·Filed 2011·Application pending·0 cites
- 0738US2012034845A1Techniques for matching measured spectra to reference spectra for in-situ optical monitoringHU XIAOYUAN·Filed 2011·Application pending·0 cites
- 0836US2012003759A1Endpoint control during chemical mechanical polishing by detecting interface between different layers through selectivity changeHU XIAOYUAN·Filed 2011·Application pending·0 cites
- 0932US2011300776A1Tuning of polishing process in multi-carrier head per platen polishing stationMAI DAVID H·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →