Inventor · disambiguated record
Xiaoxu Lu
Also filed as: LU XIAOXU
9 granted patents·64 citations·filing 2014–2018
86Inventor score
Files withKLA TENCOR CORP9
Top patents by PatentIndex Score
9 records- 0195US10175555B2183 nm CW laser and inspection systemKLA TENCOR CORP·Filed 2017·Granted Jan 8, 2019·12 cites·35 claims
- 0295US10044166B2CW DUV laser with improved stabilityKLA TENCOR CORP·Filed 2016·Granted Aug 7, 2018·10 cites·19 claims
- 0395US9865447B2High brightness laser-sustained plasma broadband sourceKLA TENCOR CORP·Filed 2016·Granted Jan 9, 2018·19 cites·38 claims
- 0494US9509112B2CW DUV laser with improved stabilityKLA TENCOR CORP·Filed 2014·Granted Nov 29, 2016·13 cites·22 claims
- 0591US9525265B2Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prismsKLA TENCOR CORP·Filed 2015·Granted Dec 20, 2016·6 cites·9 claims
- 0685US10429719B2183 nm CW laser and inspection systemKLA TENCOR CORP·Filed 2018·Granted Oct 1, 2019·2 cites·20 claims
- 0771US10032619B2High brightness laser-sustained plasma broadband sourceKLA TENCOR CORP·Filed 2017·Granted Jul 24, 2018·1 cites·20 claims
- 0869US9494531B2Multi-spot illumination for improved detection sensitivityKLA TENCOR CORP·Filed 2014·Granted Nov 15, 2016·1 cites·19 claims
- 0956US10044164B2Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prismsKLA TENCOR CORP·Filed 2016·Granted Aug 7, 2018·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →