Inventor · disambiguated record
Xinan Luo
Also filed as: Luo xinan
4 granted patents·3 pending applications·1 citations·filing 2018–2023
59Inventor score
Top patents by PatentIndex Score
7 records- 0177US12469668B2Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatusASML NETHERLANDS BV·Filed 2022·Granted Nov 11, 2025·0 cites·20 claims
- 0275US11328894B2Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatusHERMES MICROVISION INC·Filed 2018·Granted May 10, 2022·1 cites·15 claims
- 0373US2023280293A1System and method for aligning electron beams in multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0466US2023107989A1Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0562US11961698B2Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2021·Granted Apr 16, 2024·0 cites·20 claims
- 0662US11614416B2System and method for aligning electron beams in multi-beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 28, 2023·0 cites·15 claims
- 0750US2025391011A1System and method for image resolution characterizationASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →