Inventor · disambiguated record
Xingfei Mao
Also filed as: MAO XINGFEI
4 granted patents·5 pending applications·3 citations·filing 2017–2023
59Inventor score
Top patents by PatentIndex Score
9 records- 0170US11694880B2Lift thimble system, reaction chamber, and semiconductor processing equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Jul 4, 2023·2 cites·12 claims
- 0269US11410833B2Lower electrode mechanism and reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted Aug 9, 2022·1 cites·24 claims
- 0355US2023230803A1Semiconductor reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
- 0450US12191114B2Semiconductor reaction chamber and atomic layer plasma etching apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Jan 7, 2025·0 cites·20 claims
- 0547US12080524B2Semiconductor processing chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Granted Sep 3, 2024·0 cites·11 claims
- 0647US2023197407A1Upper electrode mechanism, current control method for radio frequency coil, and semiconductor processing apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Application pending·0 cites
- 0746US2023402265A1Process chamber and semiconductor process deviceBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2021·Application pending·0 cites
- 0845US2023274917A1Carrier device and semiconductor reaction chamberBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
- 0942US2025095962A1Coil device for generating plasma and semiconductor equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →