Inventor · disambiguated record
Xinhui Niu
Also filed as: NIU XINHUI
42 granted patents·2 pending applications·2,230 citations·filing 2000–2008
99Inventor score
Top patents by PatentIndex Score
44 records- 0199US6943900B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2001·Granted Sep 13, 2005·231 cites·65 claims
- 0299US6785638B2Method and system of dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2001·Granted Aug 31, 2004·315 cites·32 claims
- 0399US6699624B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2001·Granted Mar 2, 2004·210 cites·39 claims
- 0498US6891626B2Caching of intra-layer calculations for rapid rigorous coupled-wave analysesTIMBRE TECH INC·Filed 2001·Granted May 10, 2005·191 cites·32 claims
- 0598US6772084B2Overlay measurements using periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Aug 3, 2004·203 cites·91 claims
- 0698US6608690B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2001·Granted Aug 19, 2003·179 cites·60 claims
- 0796US7277189B2Generation of a library of periodic grating diffraction signalsTIMBRE TECH INC·Filed 2005·Granted Oct 2, 2007·21 cites·37 claims
- 0896US6433878B1Method and apparatus for the determination of mask rules using scatterometryTIMBRE TECHNOLOGY INC·Filed 2001·Granted Aug 13, 2002·146 cites·20 claims
- 0995US7330279B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2002·Granted Feb 12, 2008·58 cites·52 claims
- 1095US7072049B2Model optimization for structures with additional materialsTIMBRE TECH INC·Filed 2003·Granted Jul 4, 2006·69 cites·32 claims
- 1194US7064829B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2003·Granted Jun 20, 2006·47 cites·29 claims
- 1293US6775015B2Optical metrology of single featuresTIMBRE TECH INC·Filed 2002·Granted Aug 10, 2004·42 cites·55 claims
- 1392US7224471B2Azimuthal scanning of a structure formed on a semiconductor waferTIMBRE TECH INC·Filed 2003·Granted May 29, 2007·45 cites·23 claims
- 1492US6947141B2Overlay measurements using zero-order cross polarization measurementsTIMBRE TECH INC·Filed 2004·Granted Sep 20, 2005·37 cites·20 claims
- 1592US6804005B2Overlay measurements using zero-order cross polarization measurementsTIMBRE TECH INC·Filed 2002·Granted Oct 12, 2004·38 cites·116 claims
- 1692US6636843B2System and method for grating profile classificationTIMBRE TECH INC·Filed 2000·Granted Oct 21, 2003·44 cites·11 claims
- 1790US7031894B2Generating a library of simulated-diffraction signals and hypothetical profiles of periodic gratingsTIMBRE TECH INC·Filed 2002·Granted Apr 18, 2006·40 cites·42 claims
- 1890US6855464B2Grating test patterns and methods for overlay metrologyTIMBRE TECH INC·Filed 2003·Granted Feb 15, 2005·35 cites·31 claims
- 1990US6538731B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2002·Granted Mar 25, 2003·30 cites·20 claims
- 2088US7271902B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2006·Granted Sep 18, 2007·9 cites·20 claims
- 2188US6928395B2Method and system for dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2004·Granted Aug 9, 2005·28 cites·29 claims
- 2285US7593119B2Generation of a library of periodic grating diffraction signalsTOKYO ELECTRON LTD·Filed 2007·Granted Sep 22, 2009·5 cites·30 claims
- 2385US6839145B2Optical profilometry of additional-material deviations in a periodic gratingTIMBRE TECH INC·Filed 2003·Granted Jan 4, 2005·25 cites·56 claims
- 2484US7414733B2Azimuthal scanning of a structure formed on a semiconductor waferTIMBRE TECH INC·Filed 2007·Granted Aug 19, 2008·7 cites·18 claims
- 2584US7379192B2Optical metrology of single featuresTIMBRE TECH INC·Filed 2006·Granted May 27, 2008·6 cites·19 claims
- 2684US7136796B2Generation and use of integrated circuit profile-based simulation informationTIMBRE TECH INC·Filed 2002·Granted Nov 14, 2006·32 cites·51 claims
- 2782US7505153B2Model and parameter selection for optical metrologyTIMBRE TECH INC·Filed 2008·Granted Mar 17, 2009·5 cites·19 claims
- 2882US7450232B2Generic interface for an optical metrology systemTIMBRE TECH INC·Filed 2007·Granted Nov 11, 2008·9 cites·20 claims
- 2981US7580823B2Generation and use of integrated circuit profile-based simulation informationTOKYO ELECTRON LTD·Filed 2006·Granted Aug 25, 2009·9 cites·20 claims
- 3080US6743646B2Balancing planarization of layers and the effect of underlying structure on the metrology signalTIMBRE TECH INC·Filed 2001·Granted Jun 1, 2004·20 cites·20 claims
- 3177US6750961B2System and method for characterizing macro-grating test patterns in advanced lithography and etch processesTIMBRE TECH INC·Filed 2003·Granted Jun 15, 2004·12 cites·29 claims
- 3274US6694275B1Profiler business modelTIMBRE TECH INC·Filed 2000·Granted Feb 17, 2004·23 cites·27 claims
- 3372US7030999B2Optical metrology of single featuresTIMBRE TECH INC·Filed 2004·Granted Apr 18, 2006·11 cites·27 claims
- 3471US6952271B2Caching of intra-layer calculations for rapid rigorous coupled-wave analysesTIMBRE TECH INC·Filed 2004·Granted Oct 4, 2005·13 cites·41 claims
- 3567US7427521B2Generating simulated diffraction signals for two-dimensional structuresTIMBRE TECH INC·Filed 2002·Granted Sep 23, 2008·6 cites·43 claims
- 3667US6833914B1System and method for efficient simulation of reflectometry response from two-dimensional grating structuresTIMBRE TECH INC·Filed 2001·Granted Dec 21, 2004·6 cites·51 claims
- 3761US7586623B2Optical metrology of single featuresTOKYO ELECTRON LTD·Filed 2008·Granted Sep 8, 2009·2 cites·20 claims
- 3857US7630873B2Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor waferTOKYO ELECTRON LTD·Filed 2003·Granted Dec 8, 2009·4 cites·39 claims
- 3954US6961679B2Method and system of dynamic learning through a regression-based library generation processTIMBRE TECH INC·Filed 2004·Granted Nov 1, 2005·0 cites·12 claims
- 4054US6645824B1Combined optical profilometry and projection microscopy of integrated circuit structuresTIMBRE TECH INC·Filed 2002·Granted Nov 11, 2003·11 cites·33 claims
- 4154US6608686B1Measurement of metal electroplating and seed layer thickness and profileTIMBRE TECH INC·Filed 2001·Granted Aug 19, 2003·6 cites·29 claims
- 4244US7041515B2Balancing planarization of layers and the effect of underlying structure on the metrology signalTIMBRE TECH INC·Filed 2004·Granted May 9, 2006·0 cites·13 claims
- 4338US2005275850A1Shape roughness measurement in optical metrologyTIMBRE TECH INC·Filed 2004·Application pending·0 cites
- 4436US2001051856A1Caching of intra-layer calculations for rapid rigorous coupled-wave analysesFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →