Inventor · disambiguated record
Xiaofeng Su
Also filed as: SU XIAOFENG
4 granted patents·3 pending applications·0 citations·filing 2018–2023
51Inventor score
Top patents by PatentIndex Score
7 records- 0155US2025391658A1Integrated high aspect ratio etchingLAM RES CORP·Filed 2023·Application pending·0 cites
- 0251US2024379375A1Method and apparatus for etching a carbon containing layerLAM RES CORP·Filed 2022·Application pending·0 cites
- 0346US12273102B2System for turning off power consumption of auxiliary startup circuitSHANGHAI HUALI MICROELECT CORP·Filed 2023·Granted Apr 8, 2025·0 cites·6 claims
- 0446US2025226233A1In situ declogging in plasma etchingLAM RES CORP·Filed 2021·Application pending·0 cites
- 0545US12165878B2Semiconductor mask reshaping using a sacrificial layerLAM RES CORP·Filed 2020·Granted Dec 10, 2024·0 cites·19 claims
- 0628US10621862B2Driving control method and apparatus for intersection traffic light arraySHENZHEN YIJIE INNOVATIVE TECH CO LTD·Filed 2018·Granted Apr 14, 2020·0 cites·20 claims
- 0727US10431079B2Driving control apparatus for intersection traffic light arraySHENZHEN YIJIE INNOVATIVE TECH CO LTD·Filed 2018·Granted Oct 1, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →