Inventor · disambiguated record
Xingyuan Tang
Also filed as: TANG XINGYUAN
9 granted patents·262 citations·filing 2002–2010
91Inventor score
Files withNOVELLUS SYSTEMS INC9
Top patents by PatentIndex Score
9 records- 0195US7704894B1Method of eliminating small bin defects in high throughput TEOS filmsNOVELLUS SYSTEMS INC·Filed 2006·Granted Apr 27, 2010·50 cites·21 claims
- 0294US7573061B1Low-k SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Aug 11, 2009·24 cites·14 claims
- 0392US7968436B1Low-K SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2009·Granted Jun 28, 2011·15 cites·24 claims
- 0492US7282438B1Low-k SiC copper diffusion barrier filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 16, 2007·53 cites·8 claims
- 0591US6855645B2Silicon carbide having low dielectric constantNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 15, 2005·61 cites·13 claims
- 0690US7737525B1Method for producing low-K CDO filmsNOVELLUS SYSTEMS INC·Filed 2007·Granted Jun 15, 2010·9 cites·20 claims
- 0781US8034725B1Method of eliminating small bin defects in high throughput TEOS filmsNOVELLUS SYSTEMS INC·Filed 2010·Granted Oct 11, 2011·5 cites·13 claims
- 0881US6777349B2Hermetic silicon carbideNOVELLUS SYSTEMS INC·Filed 2002·Granted Aug 17, 2004·28 cites·52 claims
- 0980US7341761B1Methods for producing low-k CDO filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Mar 11, 2008·17 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →