Inventor · disambiguated record
Xiao Yang
Also filed as: YANG XIAO · YANG XIAO CHARLES
68 granted patents·11 pending applications·821 citations·filing 2001–2023
99Inventor score
Top patents by PatentIndex Score
79 records- 0198US8227285B1Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processesYANG XIAO CHARLES·Filed 2010·Granted Jul 24, 2012·46 cites·33 claims
- 0297US8704238B2Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processesYANG XIAO CHARLES·Filed 2011·Granted Apr 22, 2014·24 cites·18 claims
- 0395US8432005B2Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processesYANG XIAO CHARLES·Filed 2012·Granted Apr 30, 2013·17 cites·20 claims
- 0495US8071398B1Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processesYANG XIAO CHARLES·Filed 2009·Granted Dec 6, 2011·23 cites·20 claims
- 0595US7184195B2Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulatorMIRADIA INC·Filed 2005·Granted Feb 27, 2007·110 cites·13 claims
- 0695US6992810B2High fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Jan 31, 2006·87 cites·35 claims
- 0794US8936959B1Integrated rf MEMS, control systems and methodsYANG XIAO CHARLES·Filed 2011·Granted Jan 20, 2015·14 cites·13 claims
- 0894US8227911B1Method and structure of wafer level encapsulation of integrated circuits with cavityYANG XIAO CHARLES·Filed 2009·Granted Jul 24, 2012·18 cites·12 claims
- 0993US8742520B2Three axis magnetic sensor device and methodMCUBE INC·Filed 2013·Granted Jun 3, 2014·12 cites·20 claims
- 1092US7498715B2Method and structure for an out-of plane compliant micro actuatorYANG XIAO·Filed 2006·Granted Mar 3, 2009·30 cites·9 claims
- 1192US7068417B2Method and apparatus for a reflective spatial light modulator with a flexible pedestalMIRADIA INC·Filed 2004·Granted Jun 27, 2006·55 cites·22 claims
- 1291US7034984B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2004·Granted Apr 25, 2006·68 cites·51 claims
- 1390US12051361B2Pixel driving circuit, display panel, and display deviceXIAMEN TIANMA DISPLAY TECH CO LTD·Filed 2023·Granted Jul 30, 2024·2 cites·19 claims
- 1489US9595479B2Method and structure of three dimensional CMOS transistors with hybrid crystal orientationsMCUBE INC·Filed 2014·Granted Mar 14, 2017·10 cites·18 claims
- 1587US7608933B2Method and structure for kinetic energy based generator for portable electronic devicesYANG XIAO·Filed 2006·Granted Oct 27, 2009·18 cites·13 claims
- 1686US7928632B2Method and structure for an out-of-plane compliant micro actuatorMCUBE INC·Filed 2009·Granted Apr 19, 2011·12 cites·20 claims
- 1786US7382513B2Spatial light modulator with multi-layer landing structuresMIRADIA INC·Filed 2005·Granted Jun 3, 2008·16 cites·12 claims
- 1886US7245416B2Fabrication of a high fill ratio reflective spatial light modulator with hidden hingeMIRADIA INC·Filed 2006·Granted Jul 17, 2007·13 cites·23 claims
- 1985US9150406B2Multi-axis integrated MEMS devices with CMOS circuits and method thereforMCUBE INC·Filed 2013·Granted Oct 6, 2015·6 cites·6 claims
- 2085US8796790B2Method and structure of monolithetically integrated micromachined microphone using IC foundry-compatiable processesYANG XIAO CHARLES·Filed 2009·Granted Aug 5, 2014·10 cites·21 claims
- 2185US7022245B2Fabrication of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Apr 4, 2006·23 cites·11 claims
- 2284US8506529B1Method and structure of monolithetically integrated microneedle biochipYANG XIAO CHARLES·Filed 2009·Granted Aug 13, 2013·29 cites·8 claims
- 2382US6771851B1Fast switching method for a micro-mirror device for optical switching applicationsNAYNA NETWORKS·Filed 2001·Granted Aug 3, 2004·34 cites·21 claims
- 2481US7172921B2Method and structure for forming an integrated spatial light modulatorMIRADIA INC·Filed 2005·Granted Feb 6, 2007·10 cites·20 claims
- 2580US8592993B2Method and structure of integrated micro electro-mechanical systems and electronic devices using edge bond padsMCUBE INC·Filed 2013·Granted Nov 26, 2013·4 cites·10 claims
- 2680US7142349B2Method and structure for reducing parasitic influences of deflection devices on spatial light modulatorsMIRADIA INC·Filed 2005·Granted Nov 28, 2006·11 cites·13 claims
- 2779US7233428B2Method and apparatus for a reflective spatial light modulator with a flexible pedestalMIRADIA INC·Filed 2006·Granted Jun 19, 2007·8 cites·30 claims
- 2879US7118234B2Reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Oct 10, 2006·15 cites·18 claims
- 2979US7092140B2Architecture of a reflective spatial light modulatorMIRADIA INC·Filed 2004·Granted Aug 15, 2006·18 cites·21 claims
- 3077US8569180B2Method and structure of wafer level encapsulation of integrated circuits with cavityYANG XIAO CHARLES·Filed 2012·Granted Oct 29, 2013·4 cites·18 claims
- 3175US8530258B2Method and apparatus for MEMS oscillatorYANG XIAO·Filed 2011·Granted Sep 10, 2013·3 cites·19 claims
- 3274US8749004B2Method and structure of sensors or electronic devices using vertical mountingMCUBE INC 028143·Filed 2013·Granted Jun 10, 2014·4 cites·13 claims
- 3374US7863697B2Method and apparatus for MEMS oscillatorMIRADIA INC·Filed 2007·Granted Jan 4, 2011·6 cites·17 claims
- 3474US7190508B2Method and structure of patterning landing pad structures for spatial light modulatorsMIRADIA INC·Filed 2005·Granted Mar 13, 2007·7 cites·15 claims
- 3570US7109120B2Profiled standoff structure and method for optical display packageMIRADIA INC·Filed 2005·Granted Sep 19, 2006·4 cites·10 claims
- 3669US8148781B2Method and structures of monolithically integrated ESD suppression deviceYANG XIAO CHARLES·Filed 2009·Granted Apr 3, 2012·3 cites·18 claims
- 3769US8120076B2Method and structure of monolithically integrated infrared sensing deviceYANG XIAO CHARLES·Filed 2009·Granted Feb 21, 2012·1 cites·7 claims
- 3868US8796746B2Method and structure of monolithically integrated pressure sensor using IC foundry-compatible processesYANG XIAO CHARLES·Filed 2009·Granted Aug 5, 2014·6 cites·25 claims
- 3968US8105736B2Method and system for overlay correction during photolithographyYANG XIAO·Filed 2008·Granted Jan 31, 2012·2 cites·16 claims
- 4066US8314984B2Method and system for optical MEMS with flexible landing structuresYANG XIAO·Filed 2008·Granted Nov 20, 2012·4 cites·17 claims
- 4166US7502158B2Method and structure for high fill factor spatial light modulator with integrated spacer layerMIRADIA INC·Filed 2005·Granted Mar 10, 2009·4 cites·13 claims
- 4266US7374962B2Method of fabricating reflective spatial light modulator having high contrast ratioMIRADIA INC·Filed 2005·Granted May 20, 2008·3 cites·20 claims
- 4365US7453624B2Projection display system including a high fill ratio silicon spatial light modulatorMIRADIA INC·Filed 2006·Granted Nov 18, 2008·3 cites·7 claims
- 4462US12085794B2Display module and display deviceWUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·18 claims
- 4562US8159740B2Fabrication of a high fill ratio silicon spatial light modulatorYANG XIAO·Filed 2010·Granted Apr 17, 2012·1 cites·29 claims
- 4660US7382519B2Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrateMIRADIA INC·Filed 2007·Granted Jun 3, 2008·2 cites·22 claims
- 4760US2010075481A1Method and structure of monolithically integrated ic-mems oscillator using ic foundry-compatible processesYANG XIAO CHARLES·Filed 2009·Application pending·0 cites
- 4859US7109066B2Method and device for forming spacer structures for packaging optical reflection devicesMIRADIA INC·Filed 2004·Granted Sep 19, 2006·10 cites·27 claims
- 4956US7675670B2Fabrication of a high fill ratio silicon spatial light modulatorMIRADIA INC·Filed 2006·Granted Mar 9, 2010·1 cites·23 claims
- 5056US7670880B2Method and structure for forming an integrated spatial light modulatorMIRADIA INC·Filed 2007·Granted Mar 2, 2010·1 cites·24 claims
Showing the top 50 of 79 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →