Inventor · disambiguated record
Xu Shi
Also filed as: SHI XU
28 granted patents·20 pending applications·401 citations·filing 1996–2024
96Inventor score
Files withFILPLAS VACUUM TECHNOLOGY PTE9NANOFILM TECH INTERNATIONAL LIMITED9NANOFILM TECHNOLOGIES INT5BOE TECHNOLOGY GROUP CO LTD4NANOFILM TECHNOLOGIES INTERNAT PTE LTD4
Top patents by PatentIndex Score
48 records- 0186US11643733B2ta-C based coatings with improved hardnessNANOFILM TECH INTERNATIONAL LIMITED·Filed 2019·Granted May 9, 2023·2 cites·20 claims
- 0286US6319369B1Ignition means for a cathodic arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 1999·Granted Nov 20, 2001·44 cites·9 claims
- 0384US6387443B1Composite coatingsUNIV NANYANG·Filed 2000·Granted May 14, 2002·19 cites·6 claims
- 0484US6031239AFiltered cathodic arc sourceFILPLAS VACUUM TECHNOLOGY PTE LTD·Filed 1996·Granted Feb 29, 2000·62 cites·24 claims
- 0583US6423193B1Nitrogen doped carbon electrodesUNIV CASE WESTERN RESERVE·Filed 1999·Granted Jul 23, 2002·60 cites·12 claims
- 0680US7014738B2Enhanced macroparticle filter and cathode arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 2003·Granted Mar 21, 2006·16 cites·31 claims
- 0779US6511585B1Enhanced macroparticle filter and cathode arc sourceFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jan 28, 2003·33 cites·7 claims
- 0878US11898257B1Carbon coated electrodesNANOFILM TECH INTERNATIONAL LIMITED·Filed 2023·Granted Feb 13, 2024·0 cites·21 claims
- 0978US6413387B1Cathode arc source for metallic and dielectric coatingsFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jul 2, 2002·47 cites·17 claims
- 1075US11567249B2Light absorbing device, manufacturing method thereof, and photoelectrodeUNIV HOKKAIDO NAT UNIV CORP·Filed 2018·Granted Jan 31, 2023·2 cites·7 claims
- 1174US6143142AComposite coatingsUNIV NANYANG·Filed 1999·Granted Nov 7, 2000·29 cites·9 claims
- 1272US12123088B2Temperature resistant carbon coatingsNANOFILM TECH INTERNATIONAL LIMITED·Filed 2019·Granted Oct 22, 2024·0 cites·14 claims
- 1371US11855308B2Carbon coated hydrogen fuel cell bipolar platesNANOFILM TECH INTERNATIONAL LIMITED·Filed 2021·Granted Dec 26, 2023·0 cites·18 claims
- 1468US2025137148A1Titanium diboride wettable cathodeZHENGZHOU NON FERROUS METALS RES INSTITUTE CO LTD OF CHALCO·Filed 2024·Application pending·0 cites
- 1567US10087015B2Roller assembly and transmission deviceBOE TECHNOLOGY GROUP CO LTD·Filed 2015·Granted Oct 2, 2018·3 cites·1 claims
- 1667US6736949B2Filtered cathode arc source deposition apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 2001·Granted May 18, 2004·7 cites·19 claims
- 1766US2025034738A1Method for reducing perfluorocarbon emissions from aluminum electrolysisZHENGZHOU NON FERROUS METALS RES INSTITUTE CO LTD OF CHALCO·Filed 2024·Application pending·0 cites
- 1865US6262539B1Cathode arc source with target feeding apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jul 17, 2001·18 cites·28 claims
- 1964US6923891B2Copper interconnectsNANOFILM TECHNOLOGIES INT·Filed 2003·Granted Aug 2, 2005·14 cites·32 claims
- 2062US10120215B2Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrateBOE TECHNOLOGY GROUP CO LTD·Filed 2015·Granted Nov 6, 2018·1 cites·12 claims
- 2162US2011140367A1Novel coating having reduced stress and a method of depositing the coating on a substrateNANOFILM TECHNOLOGIES INTERNAT PTE LTD·Filed 2009·Application pending·0 cites
- 2262US2011177460A1process for producing an image on a substrateNANOFILM TECHNOLOGIES INTERNAT PTE LTD·Filed 2009·Application pending·0 cites
- 2362US2011186420A1Method for rapid deposition of a coating on a substrateNANOFILM TECHNOLOGIES INTERNAT PTE LTD·Filed 2009·Application pending·0 cites
- 2460US6899828B2Composite coatingsUNIV NANYANG·Filed 2002·Granted May 31, 2005·3 cites·4 claims
- 2559US7871506B2Continuous ARC deposition apparatus and method with multiple available targetsNANOFILM TECHNOLOGIES INTERNAT PTE LTD·Filed 2005·Granted Jan 18, 2011·2 cites·10 claims
- 2659US6761805B1Cathode arc source with magnetic field generating means positioned above and below the cathodeFILPLAS VACUUM TECHNOLOGY PTE·Filed 1999·Granted Jul 13, 2004·14 cites·19 claims
- 2754US2006270219A1Reducing stress in coatings produced by physical vapour deposition technical fieldSHI XU·Filed 2006·Application pending·0 cites
- 2854US2022042178A1Corrosion resistant carbon coatingsNANOFILM TECH INTERNATIONAL LIMITED·Filed 2019·Application pending·0 cites
- 2953US6571865B1Heat transfer surfaceUNIV NANYANG·Filed 1999·Granted Jun 3, 2003·16 cites·13 claims
- 3052US2024426016A1Inert anode aluminum electrolytic cell with vertical structureZHENGZHOU NON FERROUS METALS RES INSTITUTE CO LTD OF CHALCO·Filed 2023·Application pending·0 cites
- 3151US10138547B2Substrate carrying apparatus and sputtering device comprising the sameBOE TECHNOLOGY GROUP CO LTD·Filed 2016·Granted Nov 27, 2018·0 cites·14 claims
- 3251US2005183944A1Reducing stress in coatings produced by physical vapour depositionFiled 2005·Application pending·0 cites
- 3350US12202488B2Method and device for gradient calculatingGREAT WALL MOTOR CO LTD·Filed 2020·Granted Jan 21, 2025·0 cites·20 claims
- 3450US11903116B2Cathode arc source, filters thereof and method of filtering macroparticlesNANOFILM TECH INTERNATIONAL LIMITED·Filed 2021·Granted Feb 13, 2024·0 cites·16 claims
- 3549US11926890B2Cathode arc sourceNANOFILM TECH INTERNATIONAL LIMITED·Filed 2020·Granted Mar 12, 2024·0 cites·17 claims
- 3649US2022162739A1Improved coating processesNANOFILM TECH INTERNATIONAL LIMITED·Filed 2020·Application pending·0 cites
- 3747US2021348261A1Thick, low stress tetrahedral amorphous carbon coatingsNANOFILM TECH INTERNATIONAL LIMITED·Filed 2019·Application pending·0 cites
- 3846US6338779B1Arc monitoringFILPLAS VACUUM TECHNOLOGY PTE·Filed 1998·Granted Jan 15, 2002·9 cites·13 claims
- 3943US2024035570A1Piston rings and methods of manufactureNANOFILM VACUUM COATING SHANGHAI CO LTD·Filed 2021·Application pending·0 cites
- 4043US2010196109A1Cutting tools having plasma deposited carbon coatingsNANOFILM TECHNOLOGIES INT·Filed 2007·Application pending·0 cites
- 4140US2005115821A1Production of nanotubesFiled 2003·Application pending·0 cites
- 4239US2013180845A1Filter for removing macro-particles from a plasma beamSHI XU·Filed 2011·Application pending·0 cites
- 4338US12464610B2Distributed radio frequency or microwave thawing deviceDOTWIL INTELLIGENT TECH CO LTD·Filed 2020·Granted Nov 4, 2025·0 cites·9 claims
- 4434US2006037700A1Method and apparatus for removing material from a substrate surfaceNANOFILM TECHNOLOGIES INT·Filed 2005·Application pending·0 cites
- 4533US2006043882A1Method and apparatus for providing a substrate coating having predetermined resistivity, and uses thereforNANOFILM TECHNOLOGIES INT·Filed 2005·Application pending·0 cites
- 4633US2007092740A1Metal coatingsNANOFILM TECHNOLOGIES INT·Filed 2006·Application pending·0 cites
- 4731US2018158715A1Substrate supporting pin, substrate supporting device and substrate access systemBOE TECHNOLOGY GROUP CO LTD·Filed 2015·Application pending·0 cites
- 4829US2001002002A1Deposition apparatusFILPLAS VACUUM TECHNOLOGY PTE·Filed 1996·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →