Inventor · disambiguated record
Yao-Syuan Cheng
Also filed as: CHENG YAO-SYUAN
2 granted patents·6 pending applications·2 citations·filing 2018–2023
34Inventor score
Top patents by PatentIndex Score
8 records- 0182US11597999B2Method and device for decreasing generation of surface oxide of aluminum nitrideSKY TECH INC·Filed 2020·Granted Mar 7, 2023·2 cites·5 claims
- 0260US12224159B1Gas mixing method to enhance plasmaSKY TECH INC·Filed 2023·Granted Feb 11, 2025·0 cites·16 claims
- 0359US2025051907A1Particle prevention method in chamberSKY TECH INC·Filed 2023·Application pending·0 cites
- 0444US2022068612A1Wafer support and equipment for thin-film deposition or pre-cleaning using the sameSKY TECH INC·Filed 2021·Application pending·0 cites
- 0543US2022181190A1Wafer fixing mechanism and wafer pre-cleaning machine using the wafer fixing mechanismSKYTECH CO LTD·Filed 2020·Application pending·0 cites
- 0639US2022178021A1Wafer fixing mechanism and wafer pre-cleaning machine using the wafer fixing mechanismSKYTECH CO LTD·Filed 2020·Application pending·0 cites
- 0735US2020118802A1Masking structure for a wafer supporting plateLU LIN SHENG·Filed 2018·Application pending·0 cites
- 0830US2019244787A1Plasma etching reaction chamberCHOU WEI CHUAN·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →