Inventor · disambiguated record
Yao-Wen Guo
Also filed as: GUO YAO-WEN
5 granted patents·18 citations·filing 2006–2011
72Inventor score
Top patents by PatentIndex Score
5 records- 0192US8199314B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2011·Granted Jun 12, 2012·12 cites·20 claims
- 0279US8068208B2System and method for improving immersion scanner overlay performancePENG JUI-CHUNG·Filed 2007·Granted Nov 29, 2011·5 cites·17 claims
- 0361US7571021B2Method and system for improving critical dimension uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Aug 4, 2009·1 cites·17 claims
- 0440US7787977B2Methods and systems for forming semiconductor structuresTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Aug 31, 2010·0 cites·14 claims
- 0534US9529275B2Lithography scanner throughputLIN CHIEN-HSUN·Filed 2007·Granted Dec 27, 2016·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →