Inventor · disambiguated record
Yasuyuki Kagaya
Also filed as: KAGAYA YASUYUKI
3 granted patents·3 citations·filing 2019–2022
54Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0184US11862488B2Substrate stageTOKYO ELECTRON LTD·Filed 2020·Granted Jan 2, 2024·2 cites·20 claims
- 0267US11282733B2Stage mechanism, processing apparatus, and method of operating the stage mechanismTOKYO ELECTRON LTD·Filed 2019·Granted Mar 22, 2022·1 cites·11 claims
- 0356US12438033B2Substrate placing method and substrate placing mechanismTOKYO ELECTRON LTD·Filed 2022·Granted Oct 7, 2025·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →