Inventor · disambiguated record
Yasuhiro Kuga
Also filed as: KUGA YASUHIRO
4 granted patents·3 pending applications·23 citations·filing 2001–2023
67Inventor score
Top patents by PatentIndex Score
7 records- 0178US11798821B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Oct 24, 2023·2 cites·17 claims
- 0274US6551448B2Heat processing apparatus of substrateTOKYO ELECTRON LTD·Filed 2001·Granted Apr 22, 2003·21 cites·20 claims
- 0359US2024030049A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0446US2023152704A1Heat treatment apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0539US11393702B2Heat treatment apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2020·Granted Jul 19, 2022·0 cites·17 claims
- 0636US2014041805A1Substrate processing apparatus and gas supply apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0730US8776393B2Substrate cooling apparatus, substrate cooling method, and storage mediumMIZUNAGA KOUICHI·Filed 2010·Granted Jul 15, 2014·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →