Inventor · disambiguated record
Yanwei Liu
Also filed as: LIU YANWEI
10 granted patents·2 pending applications·72 citations·filing 2013–2025
87Inventor score
Files withKLA TENCOR CORP8GUANGZHOU SHINEDASON MFT CO LTD1GULF SECURITY TECH COMPANY LIMITED GST1JFM INT CORP1UNIV JIANGNAN1
Top patents by PatentIndex Score
12 records- 0191US9335206B2Wave front aberration metrology of optics of EUV mask inspection systemKLA TENCOR CORP·Filed 2013·Granted May 10, 2016·8 cites·25 claims
- 0291US8941336B1Optical characterization systems employing compact synchrotron radiation sourcesKLA TENCOR CORP·Filed 2014·Granted Jan 27, 2015·29 cites·10 claims
- 0390US8749179B2Optical characterization systems employing compact synchrotron radiation sourcesKLA TENCOR CORP·Filed 2013·Granted Jun 10, 2014·22 cites·48 claims
- 0488US10074036B2Critical dimension uniformity enhancement techniques and apparatusKLA TENCOR CORP·Filed 2015·Granted Sep 11, 2018·6 cites·23 claims
- 0576US9875534B2Techniques and systems for model-based critical dimension measurementsKLA TENCOR CORP·Filed 2016·Granted Jan 23, 2018·3 cites·23 claims
- 0673US9453801B2Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systemsKLA TENCOR CORP·Filed 2013·Granted Sep 27, 2016·1 cites·18 claims
- 0769US9151881B2Phase grating for mask inspection systemKLA TENCOR CORP·Filed 2013·Granted Oct 6, 2015·1 cites·37 claims
- 0866US9778205B2Delta die and delta database inspectionKLA TENCOR CORP·Filed 2015·Granted Oct 3, 2017·1 cites·27 claims
- 0952US11928942B2Systems and methods for theft prevention and detectionJFM INT CORP·Filed 2019·Granted Mar 12, 2024·1 cites·1 claims
- 1044US2025329251A1Input/output module and self-test method thereofGULF SECURITY TECH COMPANY LIMITED GST·Filed 2025·Application pending·0 cites
- 1137US10605294B2Threaded-connection anti-loosening locking deviceGUANGZHOU SHINEDASON MFT CO LTD·Filed 2018·Granted Mar 31, 2020·0 cites·10 claims
- 1235US2020086758A1Method for Measuring Capacity of Energy Storage Devices in Hybrid BusUNIV JIANGNAN·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →