Inventor · disambiguated record
Yanfu Lu
Also filed as: LU YANFU
3 granted patents·11 pending applications·0 citations·filing 2021–2025
46Inventor score
Files withASM IP HOLDING BV14
Top patents by PatentIndex Score
14 records- 0169US2024332016A1Methods for silicon germanium uniformity control using multiple precursorsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0268US2025051918A1Film deposition systems and methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0363US2024209510A1Methods of forming structures, semiconductor processing systems, and semiconductor device structuresASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0462US12163227B2Film deposition systems and methodsASM IP HOLDING BV·Filed 2022·Granted Dec 10, 2024·0 cites·16 claims
- 0562US11959173B2Methods of forming structures, semiconductor processing systems, and semiconductor device structuresASM IP HOLDING BV·Filed 2022·Granted Apr 16, 2024·0 cites·18 claims
- 0658US12057314B2Methods for silicon germanium uniformity control using multiple precursorsASM IP HOLDING BV·Filed 2021·Granted Aug 6, 2024·0 cites·24 claims
- 0757US2025273461A1Method of forming semiconductor structure, semiconductor structure, and semiconductor processing systemASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0857US2025183070A1Chamber arrangements with upper and lower pyrometers, semiconductor processing systems including chamber arrangements, and material layer deposition methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0954US2024331984A1Plasma enhanced epitaxial chemical vapor deposition systemASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1051US2024071805A1Method, assembly and system for gas injectionASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1151US2024068103A1Chamber arrangements, semiconductor processing systems having chamber arrangements, and related material layer deposition methodsASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1251US2024203734A1Methods for forming multilayer structures on a substrate and related multilayer structuresASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1351US2024204057A1Methods for forming semiconductor stacked structures on a substrate and related semiconductor structuresASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1450US2024203733A1Material layer deposition methods, material layer stacks, semiconductor processing systems, and related computer program productsASM IP HOLDING BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →