Inventor · disambiguated record
Yasuhiro Omura
Also filed as: OMURA YASUHIRO
85 granted patents·14 pending applications·2,074 citations·filing 1979–2018
99Inventor score
Files withNIKON CORP80OMURA YASUHIRO10OLYMPUS OPTICAL CO3ISHIKAWAJIMA HARIMA HEAVY IND2KOBAYASHI NAOYUKI2
Top patents by PatentIndex Score
99 records- 0198US7348575B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2005·Granted Mar 25, 2008·46 cites·83 claims
- 0298US5835275ACatadioptric system for photolithographyNIKON CORP·Filed 1997·Granted Nov 10, 1998·292 cites·7 claims
- 0397US7312463B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2006·Granted Dec 25, 2007·33 cites·39 claims
- 0497US7309870B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2006·Granted Dec 18, 2007·35 cites·49 claims
- 0597US6750948B2Projection optical system, projection exposure apparatus having the projection optical system, projection method thereof, exposure method thereof and fabricating method for fabricating a device using the projection exposure apparatusNIKON CORP·Filed 2002·Granted Jun 15, 2004·107 cites·20 claims
- 0696US6512641B2Projection exposure apparatus and methodNIKON CORP·Filed 2002·Granted Jan 28, 2003·53 cites·56 claims
- 0796US6473243B1Catadioptric imaging system and a projection exposure apparatus provided with said imaging systemNIKON CORP·Filed 2000·Granted Oct 29, 2002·85 cites·55 claims
- 0896US6195213B1Projection exposure apparatus and methodNIKON CORP·Filed 1999·Granted Feb 27, 2001·143 cites·42 claims
- 0995US7580197B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Aug 25, 2009·34 cites·29 claims
- 1095US7362508B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2003·Granted Apr 22, 2008·46 cites·77 claims
- 1195US6757051B2Projection optical system, manufacturing method thereof, and projection exposure apparatusNIKON CORP·Filed 2001·Granted Jun 29, 2004·101 cites·58 claims
- 1295US6661499B2Projection exposure apparatus with a catadioptric projection optical systemNIKON CORP·Filed 2002·Granted Dec 9, 2003·64 cites·23 claims
- 1394US7688517B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Mar 30, 2010·12 cites·35 claims
- 1494US4269052AMechanical descaling deviceISHIKAWAJIMA HARIMA HEAVY IND·Filed 1979·Granted May 26, 1981·34 cites·8 claims
- 1593US6674513B2Projection exposure methods and apparatus, and projection optical systemsNIKON CORP·Filed 2002·Granted Jan 6, 2004·48 cites·20 claims
- 1693US6606144B1Projection exposure methods and apparatus, and projection optical systemsNIKON CORP·Filed 2002·Granted Aug 12, 2003·54 cites·116 claims
- 1792US6831731B2Projection optical system and an exposure apparatus with the projection optical systemNIKON CORP·Filed 2002·Granted Dec 14, 2004·45 cites·70 claims
- 1892US6556353B2Projection optical system, projection exposure apparatus, and projection exposure methodNIKON CORP·Filed 2001·Granted Apr 29, 2003·43 cites·22 claims
- 1991US8339578B2Optical system, exposure system, and exposure methodOMURA YASUHIRO·Filed 2010·Granted Dec 25, 2012·11 cites·31 claims
- 2091US7551362B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Jun 23, 2009·8 cites·12 claims
- 2191US6909492B2Projection optical system, exposure apparatus and exposure methodNIKON CORP·Filed 2003·Granted Jun 21, 2005·57 cites·26 claims
- 2291US6864961B2Projection exposure methods and apparatus, and projection optical systemsNIKON CORP·Filed 2003·Granted Mar 8, 2005·32 cites·15 claims
- 2391US6788389B2Production method of projection optical systemNIKON CORP·Filed 2002·Granted Sep 7, 2004·47 cites·49 claims
- 2491US6639734B2Catadioptric imaging system and a projection exposure apparatus provided with said imaging systemNIKON CORP·Filed 2002·Granted Oct 28, 2003·46 cites·37 claims
- 2591US6451507B1Exposure apparatus and methodNIKON CORP·Filed 1999·Granted Sep 17, 2002·55 cites·39 claims
- 2689US8854601B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Oct 7, 2014·8 cites·21 claims
- 2789US6466303B1Projection exposure apparatus with a catadioptric projection optical systemNIKON CORP·Filed 1999·Granted Oct 15, 2002·76 cites·59 claims
- 2887US7619827B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Nov 17, 2009·10 cites·5 claims
- 2987US7609455B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Oct 27, 2009·10 cites·16 claims
- 3087US6844982B2Projection optical system, exposure system provided with the projection optical system, and exposure method using the projection optical systemNIKON CORP·Filed 2003·Granted Jan 18, 2005·36 cites·25 claims
- 3186US8605252B2Exposure apparatus, exposure method, and method for producing deviceKOBAYASHI NAOYUKI·Filed 2012·Granted Dec 10, 2013·3 cites·17 claims
- 3285US6903803B2Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatusNIKON CORP·Filed 2003·Granted Jun 7, 2005·20 cites·16 claims
- 3385US6362926B1Projection exposure apparatus and methodNIKON CORP·Filed 2000·Granted Mar 26, 2002·21 cites·19 claims
- 3484US9360763B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Jun 7, 2016·4 cites·16 claims
- 3584US7701640B2Projection optical system and method for photolithography and exposure apparatus and method using sameNIKON CORP·Filed 2007·Granted Apr 20, 2010·8 cites·17 claims
- 3684US4251956AApparatus for descaling metal stripISHIKAWAJIMA HARIMA HEAVY IND·Filed 1979·Granted Feb 24, 1981·37 cites·6 claims
- 3783US9316921B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2013·Granted Apr 19, 2016·2 cites·46 claims
- 3883US6081382ACatadioptric reduction projection optical systemNIKON CORP·Filed 1999·Granted Jun 27, 2000·51 cites·18 claims
- 3982US9310696B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Apr 12, 2016·3 cites·29 claims
- 4081US5805357ACatadioptric system for photolithographyNIKON CORP·Filed 1997·Granted Sep 8, 1998·56 cites·20 claims
- 4180US9086635B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2009·Granted Jul 21, 2015·3 cites·14 claims
- 4280US9081295B2Catadioptric projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Jul 14, 2015·2 cites·27 claims
- 4379US8208119B2Exposure apparatus, exposure method, and method for producing deviceKOBAYASHI NAOYUKI·Filed 2005·Granted Jun 26, 2012·3 cites·40 claims
- 4479US7710653B2Projection optical system, exposure system, and exposure methodNIKON CORP·Filed 2006·Granted May 4, 2010·4 cites·20 claims
- 4579US6452723B1Exposure apparatus and methodNIKON CORP·Filed 2000·Granted Sep 17, 2002·10 cites·5 claims
- 4676US9933705B2Reduction projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Apr 3, 2018·1 cites·29 claims
- 4776US9429851B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Aug 30, 2016·2 cites·26 claims
- 4875US6639732B2Projection exposure apparatus and methodNIKON CORP·Filed 2002·Granted Oct 28, 2003·9 cites·23 claims
- 4970US6646797B2Exposure apparatus and methodNIKON CORP·Filed 2002·Granted Nov 11, 2003·6 cites·7 claims
- 5069US6844915B2Optical system and exposure apparatus provided with the optical systemNIKON CORP·Filed 2002·Granted Jan 18, 2005·10 cites·8 claims
Showing the top 50 of 99 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →