Inventor · disambiguated record
Yasumi Sago
Also filed as: SAGO YASUMI
15 granted patents·12 pending applications·230 citations·filing 1994–2012
92Inventor score
Top patents by PatentIndex Score
27 records- 0184US8231767B2Magnetic field generating apparatus and plasma processing apparatusIORI KAZUYUKI·Filed 2010·Granted Jul 31, 2012·10 cites·6 claims
- 0284US5530616AElectrostastic chuckTOTO LTD·Filed 1994·Granted Jun 25, 1996·106 cites·19 claims
- 0380US7615133B2Electrostatic chuck module and cooling systemTOTO LTD·Filed 2002·Granted Nov 10, 2009·33 cites·8 claims
- 0480US7220319B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted May 22, 2007·25 cites·18 claims
- 0578US7175737B2Electrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted Feb 13, 2007·23 cites·9 claims
- 0675US9844126B2Plasma treatment apparatusIKEDA MASAYOSHI·Filed 2012·Granted Dec 12, 2017·4 cites·5 claims
- 0769US2009173444A1Surface processing apparatusCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0866USRE42175EElectrostatic chucking stage and substrate processing apparatusCANON ANELVA CORP·Filed 2009·Granted Mar 1, 2011·2 cites·26 claims
- 0966US2008156440A1Surface processing apparatusCANON ANELVA CORP·Filed 2007·Application pending·0 cites
- 1065US2008053614A1Surface Processing ApparatusCANON ANELVA CORP·Filed 2007·Application pending·0 cites
- 1163US6774570B2RF plasma processing method and RF plasma processing systemANELVA CORP·Filed 2003·Granted Aug 10, 2004·15 cites·30 claims
- 1259US2008113149A1Surface processing apparatusANELVA CORP·Filed 2007·Application pending·0 cites
- 1358US7767056B2High-frequency plasma processing apparatusCANON ANELVA CORP·Filed 2007·Granted Aug 3, 2010·0 cites·17 claims
- 1456US7513063B2Substrate processing apparatusCANON ANELVA CORP·Filed 2003·Granted Apr 7, 2009·5 cites·16 claims
- 1554US7976716B2Semiconductor device manufacturing methodCANON ANELVA CORP·Filed 2009·Granted Jul 12, 2011·0 cites·1 claims
- 1653US8007633B2Surface processing apparatusCANON ANELVA CORP·Filed 2011·Granted Aug 30, 2011·0 cites·3 claims
- 1752US7025855B2Insulation-film etching systemANELVA CORP·Filed 2002·Granted Apr 11, 2006·7 cites·12 claims
- 1851US2008014363A1Electro-Static Chucking Mechanism and Surface Processing ApparatusCANON ANELVA CORP·Filed 2007·Application pending·0 cites
- 1948US2010147801A1High-Frequency Plasma Processing ApparatusCANON ANELVA CORP·Filed 2010·Application pending·0 cites
- 2047US2003047282A1Surface processing apparatusFiled 2002·Application pending·0 cites
- 2140US2003024478A1Surface processing apparatusANELVA CORP·Filed 2002·Application pending·0 cites
- 2238US7323081B2High-frequency plasma processing apparatusCANON ANELVA CORP·Filed 2003·Granted Jan 29, 2008·0 cites·11 claims
- 2338US2001054389A1Electro-static chucking mechanism and surface processing apparatusFiled 2001·Application pending·0 cites
- 2436US2010276275A1Method of generating fine metal particles, method of manufacturing metal-containing paste, and method of forming thin metal film interconnectionCANON ANELVA CORP·Filed 2010·Application pending·0 cites
- 2534US2001030024A1Plasma-enhanced processing apparatusANELVA CORP·Filed 2001·Application pending·0 cites
- 2631US7011744B2Brine supply unitANELVA CORP·Filed 2002·Granted Mar 14, 2006·0 cites·7 claims
- 2731US2012073960A1Magnetron sputtering apparatus and electronic component manufacturing methodSHIBUYA YOHSUKE·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →