Inventor · disambiguated record
Yanko Sarov
Also filed as: SAROV YANKO
6 granted patents·7 pending applications·35 citations·filing 2008–2025
75Inventor score
Top patents by PatentIndex Score
13 records- 0194US10854423B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2019·Granted Dec 1, 2020·31 cites·22 claims
- 0268US10101507B2Mirror deviceZEISS CARL SMT GMBH·Filed 2017·Granted Oct 16, 2018·1 cites·20 claims
- 0368US2025206598A1Apparatus for stress-reduced mounting of mems-based micromirrorsZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0467US11239054B2Multi-beam particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted Feb 1, 2022·0 cites·21 claims
- 0565US2024248408A1Multi-mirror arrayZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0661US2024371596A1Multiple charged particle beam system with a mirror mode of operation, method for operating a multi-beam charged particle microscope system with a mirror mode of operation and associated computer program productCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 0757US2024379322A1Multi-beam system and multi-beam generating unit with reduced sensitivity to drift and damagesCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 0857US2024170252A1Multi-beam generating unit with increased focusing powerCARL ZEISS MULTISEM GMBH·Filed 2024·Application pending·0 cites
- 0956US2025180890A1Micro-optical elementZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 1053US2025232943A1Multiple particle beam system with prolonged maintenance intervalCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 1152US8689359B2Apparatus and method for investigating surface properties of different materialsRANGELOW IVO W·Filed 2008·Granted Apr 1, 2014·3 cites·11 claims
- 1251US10761317B2Device for swiveling a mirror element with two degrees of swiveling freedomZEISS CARL SMT GMBH·Filed 2017·Granted Sep 1, 2020·0 cites·19 claims
- 1349US12255040B2Multi-beam particle beam system and method for operating sameCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 18, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →