Inventor · disambiguated record
Yanxiang Shi
Also filed as: SHI YANXIANG
2 granted patents·2 pending applications·0 citations·filing 2021–2021
27Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0163US12131887B2Plasma processing system and method using radio frequency and microwave powerTOKYO ELECTRON LTD·Filed 2021·Granted Oct 29, 2024·0 cites·22 claims
- 0261US11887815B2Plasma processing system and method using radio frequency (RF) and microwave powerTOKYO ELECTRON LTD·Filed 2021·Granted Jan 30, 2024·0 cites·18 claims
- 0346US2023081862A1Focus Ring RegenerationTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0445US2021233775A1High-throughput dry etching of silicon oxide and silicon nitride materials by in-situ autocatalyst formationTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →