Inventor · disambiguated record
Yasutaka Souma
Also filed as: SOUMA YASUTAKA
3 granted patents·12 citations·filing 2002–2010
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0180US7891365B2Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning programTOKYO ELECTRON LTD·Filed 2007·Granted Feb 22, 2011·8 cites·9 claims
- 0251US7050710B2Thermal treatment equipment and thermal treatment methodTOKYO ELECTRON LTD·Filed 2002·Granted May 23, 2006·4 cites·20 claims
- 0339US8562753B2Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning programHIRAO TAKESHI·Filed 2010·Granted Oct 22, 2013·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →