Inventor · disambiguated record
Yasushi Taniyama
Also filed as: TANIYAMA YASUSHI
24 granted patents·4 pending applications·199 citations·filing 2000–2023
95Inventor score
Top patents by PatentIndex Score
28 records- 0194US10672632B2Transfer chamberSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted Jun 2, 2020·11 cites·17 claims
- 0292US10658217B2Transfer chamberSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted May 19, 2020·10 cites·13 claims
- 0392US6540869B2Semiconductor processing systemTOKYO ELECTRON LTD·Filed 2001·Granted Apr 1, 2003·68 cites·16 claims
- 0488US9704727B2EfemSINFONIA TECHNOLOGY CO LTD·Filed 2014·Granted Jul 11, 2017·10 cites·17 claims
- 0584US10501271B2Load portSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted Dec 10, 2019·3 cites·8 claims
- 0684US7279067B2Port structure in semiconductor processing systemTOKYO ELECTRON LTD·Filed 2003·Granted Oct 9, 2007·33 cites·12 claims
- 0783US10586723B2Door opening/closing system, and load port equipped with door opening/closing systemSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted Mar 10, 2020·3 cites·10 claims
- 0881US6984097B1Mounting/demounting device for wafer carrier lidTOKYO ELECTRON LTD·Filed 2000·Granted Jan 10, 2006·29 cites·8 claims
- 0980US10923372B2Gas injection deviceSINFONIA TECHNOLOGY CO LTD·Filed 2016·Granted Feb 16, 2021·3 cites·8 claims
- 1080US2024038554A1Transfer chamberSINFONIA TECHNOLOGY CO LTD·Filed 2023·Application pending·0 cites
- 1178US11823923B2Transfer chamberSINFONIA TECHNOLOGY CO LTD·Filed 2022·Granted Nov 21, 2023·0 cites·8 claims
- 1276US10947063B2Load portSINFONIA TECHNOLOGY CO LTD·Filed 2019·Granted Mar 16, 2021·1 cites·11 claims
- 1372US9412634B2Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEMSINFONIA TECHNOLOGY CO LTD·Filed 2014·Granted Aug 9, 2016·3 cites·19 claims
- 1471US11823934B2Wafer stockerSINFONIA TECHNOLOGY CO LTD·Filed 2023·Granted Nov 21, 2023·0 cites·4 claims
- 1571US7987742B2Transportation apparatus and tension adjustment method of belt in the sameSHINKO ELECTRIC CO LTD·Filed 2007·Granted Aug 2, 2011·6 cites·4 claims
- 1669US11424145B2Transfer chamberSINFONIA TECHNOLOGY CO LTD·Filed 2020·Granted Aug 23, 2022·0 cites·20 claims
- 1768US6676356B2Device for attaching target substrate transfer container to semiconductor processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Jan 13, 2004·12 cites·14 claims
- 1861US8540473B2Load portASA FUMINORI·Filed 2011·Granted Sep 24, 2013·2 cites·7 claims
- 1959US10930537B2Door opening/closing system, and load port equipped with door opening/closing systemSINFONIA TECHNOLOGY CO LTD·Filed 2020·Granted Feb 23, 2021·0 cites·9 claims
- 2058US11610797B2Wafer stockerSINFONIA TECHNOLOGY CO LTD·Filed 2019·Granted Mar 21, 2023·0 cites·8 claims
- 2154US7393172B1Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer deviceTOKYO ELECTRON LTD·Filed 2000·Granted Jul 1, 2008·5 cites·6 claims
- 2253US2019145641A1Method for manufacturing semiconductorSINFONIA TECHNOLOGY CO LTD·Filed 2019·Application pending·0 cites
- 2352US2015024671A1Efem and load portSINFONIA TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2450US11851289B2Conveyance system for transferring frame waferSINFONIA TECHNOLOGY CO LTD·Filed 2020·Granted Dec 26, 2023·0 cites·8 claims
- 2548US11710652B2Transport systemSINFONIA TECHNOLOGY CO LTD·Filed 2020·Granted Jul 25, 2023·0 cites·8 claims
- 2645US11658047B2Exhaust nozzle unit, load port, and EFEMSINFONIA TECHNOLOGY CO LTD·Filed 2019·Granted May 23, 2023·0 cites·7 claims
- 2738US11139188B2Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatusSINFONIA TECHNOLOGY CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·18 claims
- 2837US2002179892A1Apparatus for detaching/attaching wafer carrier lidFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →