Inventor · disambiguated record
Yasutoshi Umehara
Also filed as: UMEHARA YASUTOSHI
7 granted patents·5 pending applications·40 citations·filing 1994–2022
80Inventor score
Top patents by PatentIndex Score
12 records- 0157US8989477B2Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 24, 2015·1 cites·9 claims
- 0257US5999005AVoltage and displacement measuring apparatus and probeFUJITSU LTD·Filed 1997·Granted Dec 7, 1999·18 cites·7 claims
- 0350US2025067664A1Determination method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0449US11519717B2Film thickness measuring system and film thickness measuring methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 6, 2022·0 cites·9 claims
- 0549US2023168124A1Light source, spectroscopic analysis system, and spectroscopic analysis methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0647US11226191B2Film thickness measurement device and correction methodTOKYO ELECTRON LTD·Filed 2019·Granted Jan 18, 2022·0 cites·7 claims
- 0746US5677635AVoltage and displacement measuring apparatus and probeFUJITSU LTD·Filed 1994·Granted Oct 14, 1997·10 cites·10 claims
- 0843US5550479ASignal measuring apparatus and signal measuring methodFUJITSU LTD·Filed 1995·Granted Aug 27, 1996·11 cites·15 claims
- 0942US2015055754A1X-ray inspection method and x-ray inspection deviceTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1038US8751196B2Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatusMORIYA TSUYOSHI·Filed 2010·Granted Jun 10, 2014·0 cites·15 claims
- 1136US2020126829A1Maintenance control method of controlling maintenance of processing device and control deviceTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1236US2010153065A1Information processing device, information processing method and programTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →