Inventor · disambiguated record

Yea-Jer Arthur Chen

Also filed as: CHEN YEA-JER ARTHUR

1 granted patent·1 pending application·40 citations·filing 1997–2001

48Inventor score

Technology areasH10W

Files withLAM RES CORP1

Top patents by PatentIndex Score

2 records

0170US6221792B1Metal and metal silicide nitridization in a high density, low pressure plasma reactorLAM RES CORP·Filed 1997·Granted Apr 24, 2001·40 cites·24 claims
0232US2001002326A1Metal and metal silicide nitridization in a high density, low pressure plasma reactorFiled 2001·Application pending·0 cites

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