Inventor · disambiguated record
Yen-Di Tsen
Also filed as: TSEN YEN-DI
23 granted patents·88 citations·filing 2010–2018
94Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD9TAIWAN SEMICONDUCTOR MFG3WU SUNNY3HSU CHIH-WEI2TSAI PO-FENG2
Top patents by PatentIndex Score
23 records- 0192US8295965B2Semiconductor processing dispatch controlWU SUNNY·Filed 2010·Granted Oct 23, 2012·15 cites·7 claims
- 0289US9442392B2Scanner overlay correction system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 13, 2016·10 cites·20 claims
- 0389US8889434B2Scanner overlay correction system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Nov 18, 2014·8 cites·12 claims
- 0488US9102033B2Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing processHUI KEUNG·Filed 2010·Granted Aug 11, 2015·11 cites·20 claims
- 0586US8627251B2Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processesCHEN JUI-LONG·Filed 2012·Granted Jan 7, 2014·7 cites·20 claims
- 0683US9165843B2Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 20, 2015·3 cites·20 claims
- 0783US9158301B2Semiconductor processing dispatch controlTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Oct 13, 2015·4 cites·20 claims
- 0882US10096482B2Apparatus and method for chemical mechanical polishing process controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 9, 2018·3 cites·20 claims
- 0982US8205173B2Physical failure analysis guiding methodsWU SUNNY·Filed 2010·Granted Jun 19, 2012·7 cites·20 claims
- 1079US8938698B2Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processesTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jan 20, 2015·3 cites·19 claims
- 1179US8288063B2Defense system in advanced process controlLU SHIN-RUNG·Filed 2010·Granted Oct 16, 2012·4 cites·19 claims
- 1278US10875148B2Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·2 cites·18 claims
- 1378US9123583B2Overlay abnormality gating by Z dataTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 1, 2015·4 cites·20 claims
- 1475US8406904B2Two-dimensional multi-products multi-tools advanced process controlHSU CHIH-WEI·Filed 2011·Granted Mar 26, 2013·3 cites·20 claims
- 1574US8781614B2Semiconductor processing dispatch controlWU SUNNY·Filed 2012·Granted Jul 15, 2014·2 cites·18 claims
- 1662US9250619B2Systems and methods of automatic boundary control for semiconductor processesHSU CHIH-WEI·Filed 2011·Granted Feb 2, 2016·1 cites·20 claims
- 1762US8549012B2Processing exception handlingTSAI PO-FENG·Filed 2010·Granted Oct 1, 2013·1 cites·18 claims
- 1857US9082661B2Scanner overlay correction system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 14, 2015·0 cites·20 claims
- 1941US9733577B2Intra-field process control for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 15, 2017·0 cites·20 claims
- 2039US9997420B2Method and/or system for chemical mechanical planarization (CMP)TAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 12, 2018·0 cites·20 claims
- 2139US9026239B2APC model extension using existing APC modelsTSAI PO-FENG·Filed 2010·Granted May 5, 2015·0 cites·18 claims
- 2235US9588446B2Calibration apparatus and an adjustment method for a lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 7, 2017·0 cites·17 claims
- 2334US8793638B2Method of optimizing design for manufacturing (DFM)HUI KEUING·Filed 2012·Granted Jul 29, 2014·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →