Inventor · disambiguated record
Yihong Chen
Also filed as: CHEN YIHONG
46 granted patents·13 pending applications·166 citations·filing 2001–2025
97Inventor score
Files withAPPLIED MATERIALS INC47VILLARRUEL FERNANDO X3CHEN YIHONG2APPLIED MAERIALS INC1JDS UNIPHASE CORP1
Top patents by PatentIndex Score
59 records- 0198US10886172B2Methods for wordline separation in 3D-NAND devicesAPPLIED MATERIALS INC·Filed 2020·Granted Jan 5, 2021·8 cites·20 claims
- 0297US10636669B2Seam healing using high pressure annealAPPLIED MATERIALS INC·Filed 2019·Granted Apr 28, 2020·15 cites·20 claims
- 0397US10319604B2Methods for self-aligned patterningAPPLIED MATERIALS INC·Filed 2017·Granted Jun 11, 2019·20 cites·19 claims
- 0496US10354916B2Methods for wordline separation in 3D-NAND devicesAPPLIED MATERIALS INC·Filed 2018·Granted Jul 16, 2019·12 cites·20 claims
- 0595US10622251B2Methods for wordline separation in 3D-NAND devicesAPPLIED MATERIALS INC·Filed 2019·Granted Apr 14, 2020·8 cites·13 claims
- 0695US10480074B2Apparatus for radical-based deposition of dielectric filmsAPPLIED MATERIALS INC·Filed 2017·Granted Nov 19, 2019·15 cites·20 claims
- 0794USD1086426SHandheld fanCHEN YIHONG·Filed 2025·Granted Jul 29, 2025·10 cites·1 claims
- 0891US10636659B2Selective deposition for simplified process flow of pillar formationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 28, 2020·7 cites·9 claims
- 0991US9508545B2Selectively lateral growth of silicon oxide thin filmAPPLIED MATERIALS INC·Filed 2015·Granted Nov 29, 2016·6 cites·12 claims
- 1090US9840777B2Apparatus for radical-based deposition of dielectric filmsAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·4 cites·20 claims
- 1189US11174551B2Methods for depositing tungsten on halosilane based metal silicide nucleation layersAPPLIED MATERIALS INC·Filed 2017·Granted Nov 16, 2021·2 cites·20 claims
- 1288US10559465B2Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxideAPPLIED MATERIALS INC·Filed 2018·Granted Feb 11, 2020·5 cites·20 claims
- 1388US9255335B2Catalysts for low temperature electrolytic CO2 reductionKANAN MATTHEW W·Filed 2012·Granted Feb 9, 2016·16 cites·13 claims
- 1487US10468263B2Tungsten deposition without barrier layerAPPLIED MATERIALS INC·Filed 2018·Granted Nov 5, 2019·4 cites·10 claims
- 1587US9978685B2Conformal amorphous silicon as nucleation layer for W ALD processAPPLIED MATERIALS INC·Filed 2016·Granted May 22, 2018·4 cites·15 claims
- 1685US9384950B2Chamber coatingsAPPLIED MATERIALS INC·Filed 2015·Granted Jul 5, 2016·4 cites·17 claims
- 1784US9741558B2Selectively lateral growth of silicon oxide thin filmAPPLIED MATERIALS INC·Filed 2016·Granted Aug 22, 2017·3 cites·8 claims
- 1879US10854511B2Methods of lowering wordline resistanceAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·2 cites·14 claims
- 1979US10276379B2Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxideAPPLIED MATERIALS INC·Filed 2018·Granted Apr 30, 2019·2 cites·20 claims
- 2077US10559497B2Seamless tungsten fill by tungsten oxidation-reductionAPPLIED MATERIALS INC·Filed 2018·Granted Feb 11, 2020·2 cites·15 claims
- 2176US9548543B2Method for fabricating and packaging an M×N phased-array antennaSUBBARAMAN HARISH·Filed 2015·Granted Jan 17, 2017·3 cites·16 claims
- 2274US11043386B2Enhanced spatial ALD of metals through controlled precursor mixingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 22, 2021·1 cites·19 claims
- 2373US10600684B2Ultra-thin diffusion barriersAPPLIED MATERIALS INC·Filed 2018·Granted Mar 24, 2020·1 cites·13 claims
- 2472US11702742B2Methods of forming nucleation layers with halogenated silanesAPPLIED MATERIALS INC·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 2572US11289374B2Nucleation-free gap fill ALD processAPPLIED MATERIALS INC·Filed 2017·Granted Mar 29, 2022·1 cites·4 claims
- 2670US11887856B2Enhanced spatial ALD of metals through controlled precursor mixingAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·0 cites·17 claims
- 2769US12394670B2Nucleation-free gap fill ALD processAPPLIED MATERIALS INC·Filed 2022·Granted Aug 19, 2025·0 cites·16 claims
- 2867US9613908B2Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applicationsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 4, 2017·1 cites·20 claims
- 2966US7903980B2Amplified wavelength broadband video distribution architectures using a phase modulating waveguideVILLARRUEL FERNANDO X·Filed 2007·Granted Mar 8, 2011·4 cites·29 claims
- 3064US11069568B2Ultra-thin diffusion barriersAPPLIED MATERIALS INC·Filed 2020·Granted Jul 20, 2021·0 cites·18 claims
- 3164US11066743B2Selective atomic layer deposition of rutheniumAPPLIED MATERIALS INC·Filed 2018·Granted Jul 20, 2021·0 cites·18 claims
- 3264US8265490B2Transamplifier, system and method for amplification of optical signals at plural wavelengthsVILLARRUEL FERNANDO X·Filed 2009·Granted Sep 11, 2012·3 cites·20 claims
- 3362US10854461B2Tungsten deposition without barrier layerAPPLIED MATERIALS INC·Filed 2019·Granted Dec 1, 2020·0 cites·20 claims
- 3462US8111992B2Amplified wavelength broadband video distribution architecturesVILLARRUEL FERNANDO X·Filed 2007·Granted Feb 7, 2012·3 cites·16 claims
- 3561US11094544B2Methods of forming self-aligned viasAPPLIED MATERIALS INC·Filed 2019·Granted Aug 17, 2021·0 cites·4 claims
- 3661US10741435B2Oxidative volumetric expansion of metals and metal containing compoundsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 11, 2020·0 cites·18 claims
- 3760US2021013038A1Methods of Forming Tungsten PillarsAPPLIED MAERIALS INC·Filed 2020·Application pending·0 cites
- 3859US10410865B2Methods of forming self-aligned viasAPPLIED MATERIALS INC·Filed 2018·Granted Sep 10, 2019·0 cites·17 claims
- 3958US2019214228A1Radical assisted cure of dielectric filmsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4058US2016138161A1Radical assisted cure of dielectric filmsAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4158US2016017487A1Integrated pre-clean and deposition of low-damage layersAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4257US10002757B2Selectively lateral growth of silicon oxide thin filmAPPLIED MATERIALS INC·Filed 2017·Granted Jun 19, 2018·0 cites·15 claims
- 4357US2015167160A1Enabling radical-based deposition of dielectric filmsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4456US10784107B2Methods of forming tungsten pillarsAPPLIED MATERIALS INC·Filed 2018·Granted Sep 22, 2020·0 cites·12 claims
- 4556US10319624B2Oxidative volumetric expansion of metals and metal containing compoundsAPPLIED MATERIALS INC·Filed 2017·Granted Jun 11, 2019·0 cites·18 claims
- 4656US2019252206A1Methods For Self-Aligned PatterningAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4754US11244824B2Conformal doped amorphous silicon as nucleation layer for metal depositionAPPLIED MATERIALS INC·Filed 2018·Granted Feb 8, 2022·0 cites·18 claims
- 4852US12325910B2Deposition of conformal and gap-fill amorphous silicon thin-filmsAPPLIED MATERIALS INC·Filed 2016·Granted Jun 10, 2025·0 cites·16 claims
- 4949US10615050B2Methods for gapfill in high aspect ratio structuresAPPLIED MATERIALS INC·Filed 2018·Granted Apr 7, 2020·0 cites·17 claims
- 5049US2017306490A1Enhanced Spatial ALD Of Metals Through Controlled Precursor MixingAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
Showing the top 50 of 59 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →