Inventor · disambiguated record

Yi Chung Chiu

Also filed as: CHIU YI-CHUNG

2 granted patents·1 citations·filing 2014–2018

33Inventor score

Technology areasC23C

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0181US10100407B2Hardware and process for film uniformity improvementLAM RES CORP·Filed 2014·Granted Oct 16, 2018·1 cites·29 claims
0272US10526700B2Hardware and process for film uniformity improvementLAM RES CORP·Filed 2018·Granted Jan 7, 2020·0 cites·28 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →