Inventor · disambiguated record
Yi-Sha Ku
Also filed as: KU YI SHA
26 granted patents·5 pending applications·129 citations·filing 2005–2023
95Inventor score
Top patents by PatentIndex Score
31 records- 0189US7477396B2Methods and systems for determining overlay error based on target image symmetryNANOMETRICS INC·Filed 2006·Granted Jan 13, 2009·14 cites·14 claims
- 0289US7379184B2Overlay measurement targetNANOMETRICS INC·Filed 2005·Granted May 27, 2008·28 cites·27 claims
- 0388US8386969B2Method for designing overlay targets and method and system for measuring overlay error using the sameIND TECH RES INST·Filed 2011·Granted Feb 26, 2013·5 cites·17 claims
- 0488US7532317B2Scatterometry method with characteristic signatures matchingIND TECH RES INST·Filed 2005·Granted May 12, 2009·16 cites·24 claims
- 0584US7847939B2Overlay measurement targetNANOMETRICS INC·Filed 2008·Granted Dec 7, 2010·12 cites·24 claims
- 0679US9752866B2Measurement systemIND TECH RES INST·Filed 2015·Granted Sep 5, 2017·4 cites·14 claims
- 0779US8699021B2System, method and computer readable medium for through silicon via structure measurementKU YI SHA·Filed 2011·Granted Apr 15, 2014·5 cites·17 claims
- 0876US8830458B2Measurement systems and measurement methodsIND TECH RES INST·Filed 2013·Granted Sep 9, 2014·4 cites·8 claims
- 0975US8250497B2Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the sameHSU WEI TE·Filed 2009·Granted Aug 21, 2012·11 cites·6 claims
- 1074US8321821B2Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the sameKU YI SHA·Filed 2009·Granted Nov 27, 2012·4 cites·8 claims
- 1174US7864324B2Reflective scatterometerIND TECH RES INST·Filed 2009·Granted Jan 4, 2011·4 cites·20 claims
- 1269US7430052B2Method for correlating the line width roughness of gratings and method for measurementIND TECH RES INST·Filed 2007·Granted Sep 30, 2008·6 cites·17 claims
- 1368US7872741B2Method and apparatus for scatterfield microscopical measurementIND TECH RES INST·Filed 2008·Granted Jan 18, 2011·3 cites·2 claims
- 1468US7652776B2Structure and method for overlay measurementIND TECH RES INST·Filed 2007·Granted Jan 26, 2010·4 cites·11 claims
- 1564US8139233B2System and method for via structure measurementKU YI SHA·Filed 2010·Granted Mar 20, 2012·2 cites·21 claims
- 1663US8537213B2Method for measuring via bottom profileSHYU DEH-MING·Filed 2010·Granted Sep 17, 2013·2 cites·6 claims
- 1761US12354290B2Sample depth-measuring device and methodIND TECH RES INST·Filed 2023·Granted Jul 8, 2025·0 cites·10 claims
- 1861US12007221B2Heterogeneous integration detecting method and heterogeneous integration detecting apparatusIND TECH RES INST·Filed 2021·Granted Jun 11, 2024·0 cites·10 claims
- 1958US11248903B2Three-dimension measurement device and operation method thereofIND TECH RES INST·Filed 2019·Granted Feb 15, 2022·0 cites·16 claims
- 2056US8319971B2Scatterfield microscopical measuring method and apparatusSHYU DEH-MING·Filed 2008·Granted Nov 27, 2012·1 cites·14 claims
- 2153US7619753B2Method for measuring dimensions and optical system using the sameIND TECH RES INST·Filed 2006·Granted Nov 17, 2009·2 cites·20 claims
- 2253US2009313589A1Method for designing overlay targets and method and system for measuring overlay error using the sameIND TECH RES INST·Filed 2008·Application pending·0 cites
- 2348US7355713B2Method for inspecting a grating biochipIND TECH RES INST·Filed 2006·Granted Apr 8, 2008·0 cites·18 claims
- 2445US7800824B2Method for designing gratingsIND TECH RES INST·Filed 2007·Granted Sep 21, 2010·2 cites·9 claims
- 2544US9182681B2Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscopeIND TECH RES INST·Filed 2012·Granted Nov 10, 2015·0 cites·4 claims
- 2641US2014333936A1Thickness measuring system and method for a bonding layerIND TECH RES INST·Filed 2014·Application pending·0 cites
- 2739US7433060B2Method for correlating a structural parameter of a plurality of gratings and method for determining a structural parameter value of an unknown grating using the sameIND TECH RES INST·Filed 2006·Granted Oct 7, 2008·0 cites·24 claims
- 2838US10094774B2Scattering measurement system and methodIND TECH RES INST·Filed 2016·Granted Oct 9, 2018·0 cites·2 claims
- 2935US2012290239A1Thin metal film measurement methodKU YI-SHA·Filed 2011·Application pending·0 cites
- 3034US2006117293A1Method for designing an overlay markSMITH NIGEL·Filed 2005·Application pending·0 cites
- 3133US2017045355A1Scattering measurement system and methodIND TECH RES INST·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →