Inventor · disambiguated record
Yin Tim Tso
Also filed as: TSO YIN TIM
7 granted patents·28 citations·filing 2003–2007
81Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0175US7576832B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 18, 2009·5 cites·18 claims
- 0272US7657334B2Lithographic apparatus and control methodASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·3 cites·11 claims
- 0370US8014881B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 6, 2011·3 cites·27 claims
- 0468US7016019B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 21, 2006·10 cites·52 claims
- 0557US7453228B2Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceASML NETHERLANDS BV·Filed 2006·Granted Nov 18, 2008·2 cites·16 claims
- 0654US7379156B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 27, 2008·5 cites·19 claims
- 0742US7774287B2System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 10, 2010·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →