Inventor · disambiguated record
Yi Zhou
Also filed as: ZHOU YI · ZHOU YI-YANG
6 granted patents·2 pending applications·9 citations·filing 1999–2025
71Inventor score
Top patents by PatentIndex Score
8 records- 0174US12255055B2Integrated cleaning process for substrate etchingAPPLIED MATERIALS INC·Filed 2022·Granted Mar 18, 2025·0 cites·18 claims
- 0272US2025183016A1Integrated cleaning process for substrate etchingAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0363US10217627B2Methods of non-destructive post tungsten etch residue removalAPPLIED MATERIALS INC·Filed 2013·Granted Feb 26, 2019·1 cites·18 claims
- 0459US11521838B2Integrated cleaning process for substrate etchingAPPLIED MATERIALS INC·Filed 2018·Granted Dec 6, 2022·0 cites·20 claims
- 0557US11702738B2Chamber processes for reducing backside particlesAPPLIED MATERIALS INC·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 0649US9885567B2Substrate placement detection in semiconductor equipment using thermal response characteristicsAPPLIED MATERIALS INC·Filed 2014·Granted Feb 6, 2018·0 cites·19 claims
- 0740US2015064880A1Post etch treatment technology for enhancing plasma-etched silicon surface stability in ambientAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0834US6120350AProcess for reconditioning polishing padsMEMC ELECTRONIC MATERIALS·Filed 1999·Granted Sep 19, 2000·8 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →