Inventor · disambiguated record
Yoshitaka Enoki
Also filed as: ENOKI YOSHITAKA
3 granted patents·1 pending application·2 citations·filing 2012–2021
51Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0175US11776105B2Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Oct 3, 2023·1 cites·17 claims
- 0257US8778812B2Apparatus and method of forming thin film including adsorption step and reaction stepTOKYO ELECTRON LTD·Filed 2012·Granted Jul 15, 2014·1 cites·12 claims
- 0343US11328901B2Deposition methodTOKYO ELECTRON LTD·Filed 2020·Granted May 10, 2022·0 cites·9 claims
- 0439US2021018905A1State management system and state management methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →