Inventor · disambiguated record
Yohei Eto
Also filed as: Eto Yohei
5 granted patents·15 citations·filing 2016–2020
74Inventor score
Files withEBARA CORP5
Top patents by PatentIndex Score
5 records- 0191US10589398B2Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer programEBARA CORP·Filed 2018·Granted Mar 17, 2020·6 cites·7 claims
- 0290US10414018B2Apparatus and method for regulating surface temperature of polishing padEBARA CORP·Filed 2017·Granted Sep 17, 2019·4 cites·15 claims
- 0386US11380559B2Carrier device, work processing apparatus, control method of carrier device and storage medium storing programEBARA CORP·Filed 2020·Granted Jul 5, 2022·2 cites·18 claims
- 0473US10475691B2Substrate transfer handEBARA CORP·Filed 2016·Granted Nov 12, 2019·2 cites·14 claims
- 0569US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →