Inventor · disambiguated record
Youfan Gu
Also filed as: GU YOUFAN
26 granted patents·2 pending applications·799 citations·filing 1996–2016
97Inventor score
Files withMKS INSTR INC20GU YOUFAN4JIANGYIN HUILONG ELECTRIC HEATING APPLIANCE CO LTD2CHEN XING1DOZORETZ PAUL1
Top patents by PatentIndex Score
28 records- 0195US5827370AMethod and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnaceMKS INSTR INC·Filed 1997·Granted Oct 27, 1998·138 cites·76 claims
- 0293US7932480B2Multiple heater control system with expandable modular functionalityMKS INSTR INC·Filed 2006·Granted Apr 26, 2011·54 cites·62 claims
- 0393US6197119B1Method and apparatus for controlling polymerized teos build-up in vacuum pump linesMKS INSTR INC·Filed 1999·Granted Mar 6, 2001·109 cites·10 claims
- 0491US9314824B2Powder and deposition control in throttle valvesMKS INSTR INC·Filed 2013·Granted Apr 19, 2016·20 cites·35 claims
- 0590US5820641AFluid cooled trapMKS INSTR INC·Filed 1996·Granted Oct 13, 1998·147 cites·63 claims
- 0689US6488745B2Trap apparatus and method for condensable by-products of deposition reactionsMKS INSTR INC·Filed 2001·Granted Dec 3, 2002·51 cites·31 claims
- 0788US8172197B2Fast-acting pneumatic diaphragm valveGU YOUFAN·Filed 2006·Granted May 8, 2012·28 cites·58 claims
- 0888US7962294B2Integrated absolute and differential pressure transducerMKS INSTR INC·Filed 2009·Granted Jun 14, 2011·15 cites·12 claims
- 0987US7455720B2Method and apparatus for preventing products of TiCL4 and NH3 or other feed gas reactions from damaging vacuum pumps in TiN or other deposition systemsMKS INSTR INC·Filed 2005·Granted Nov 25, 2008·7 cites·9 claims
- 1086US9206919B2Corrosion and deposition protected valve apparatus and methodMKS INSTR INC·Filed 2013·Granted Dec 8, 2015·12 cites·21 claims
- 1185US6672171B2Combination differential and absolute pressure transducer for load lock controlMKS INSTR INC·Filed 2001·Granted Jan 6, 2004·37 cites·29 claims
- 1285US6238514B1Apparatus and method for removing condensable aluminum vapor from aluminum etch effluentMKS INSTR INC·Filed 2000·Granted May 29, 2001·51 cites·35 claims
- 1384US8671987B2Two-stage, slow-start valve apparatusGU YOUFAN·Filed 2010·Granted Mar 18, 2014·7 cites·11 claims
- 1484US8541716B2Heater control with high-limit thermal safety shutdownGU YOUFAN·Filed 2011·Granted Sep 24, 2013·9 cites·26 claims
- 1584US6909975B2Integrated absolute and differential pressure transducerMKS INSTR INC·Filed 2003·Granted Jun 21, 2005·22 cites·23 claims
- 1680US7477996B2Integrated absolute and differential pressure transducerMKS INSTR INC·Filed 2007·Granted Jan 13, 2009·10 cites·7 claims
- 1780US6361607B2Apparatus for controlling polymerized teos build-up in vacuum pump linesMKS INSTR INC·Filed 2001·Granted Mar 26, 2002·25 cites·37 claims
- 1878US7871587B2Reactive chemical containment systemMKS INSTR INC·Filed 2009·Granted Jan 18, 2011·7 cites·85 claims
- 1974US6562109B2Acceleration assisted particle/gas separation systemMKS INSTR INC·Filed 2001·Granted May 13, 2003·22 cites·90 claims
- 2070US6790258B2Method for removing condensable aluminum chloride vapor from aluminum etch effluentMKS INSTR INC·Filed 2001·Granted Sep 14, 2004·7 cites·36 claims
- 2166US7076920B2Method of using a combination differential and absolute pressure transducer for controlling a load lockMKS INSTR INC·Filed 2001·Granted Jul 18, 2006·14 cites·37 claims
- 2264US10809749B2Temperature controllerJIANGYIN HUILONG ELECTRIC HEATING APPLIANCE CO LTD·Filed 2016·Granted Oct 20, 2020·2 cites·14 claims
- 2352US9200711B2Method of two-stage flow controlMKS INSTR INC·Filed 2014·Granted Dec 1, 2015·0 cites·12 claims
- 2450US6895178B2Vapor delivery systemMKS INSTR INC·Filed 2002·Granted May 17, 2005·5 cites·28 claims
- 2548US8679287B2Method and apparatus for preventing ALD reactants from damaging vacuum pumpsGU YOUFAN·Filed 2005·Granted Mar 25, 2014·0 cites·8 claims
- 2639US2006004539A1Integrated absolute and differential pressure transducerDOZORETZ PAUL·Filed 2005·Application pending·0 cites
- 2738US2013146225A1Gas injector apparatus for plasma applicatorCHEN XING·Filed 2011·Application pending·0 cites
- 2837US11157027B2Heater alarm and control moduleJIANGYIN HUILONG ELECTRIC HEATING APPLIANCE CO LTD·Filed 2016·Granted Oct 26, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →