Inventor · disambiguated record
Yoichi Honda
Also filed as: HONDA YOICHI
6 granted patents·172 citations·filing 1997–2002
86Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0191US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 0285US6443641B2Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Sep 3, 2002·28 cites·7 claims
- 0384US6770149B2Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2002·Granted Aug 3, 2004·19 cites·5 claims
- 0476US6261007B1Substrate process method and substrate process apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·6 claims
- 0571US6391110B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·15 cites·4 claims
- 0668US6398879B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·10 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →