Inventor · disambiguated record
Yoji Iizuka
Also filed as: IIZUKA YOJI
9 granted patents·8 pending applications·86 citations·filing 1995–2023
85Inventor score
Files withTOKYO ELECTRON LTD17
Top patents by PatentIndex Score
17 records- 0171US12406862B2Vacuum processing apparatus and oxidizing gas removal methodTOKYO ELECTRON LTD·Filed 2023·Granted Sep 2, 2025·0 cites·3 claims
- 0270US11081321B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 3, 2021·1 cites·4 claims
- 0363US5520142ADecompression containerTOKYO ELECTRON LTD·Filed 1995·Granted May 28, 1996·29 cites·18 claims
- 0461US2022403509A1Vacuum processing apparatus and oxidizing gas removal methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0558US5676757ADecompression containerTOKYO ELECTRON LTD·Filed 1996·Granted Oct 14, 1997·23 cites·2 claims
- 0654US5857827ACassette chamberTOKYO ELECTRON LTD·Filed 1997·Granted Jan 12, 1999·19 cites·19 claims
- 0749US2015214423A1Method for manufacturing optical device and optical deviceTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0848US2023223251A1Method of manufacturing semiconductor device, semiconductor manufacturing device, and systemTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0947US6013112ARelay apparatus for relaying object to be treatedTOKYO ELECTRON LTD·Filed 1997·Granted Jan 11, 2000·14 cites·8 claims
- 1044US11136668B2Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 5, 2021·0 cites·4 claims
- 1142US11035041B2Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 15, 2021·0 cites·11 claims
- 1242US2017252756A1Shower head and film forming apparatusTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 1335US2011076117A1Process module, substrate processing apparatus, and substrate transferring methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1435US2011142579A1Transfer device and target object processing apparatus including sameTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1534US2010247274A1Substrate exchanging mechanism and method of exchanging substratesTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 1633US2015214429A1Method for manufacturing rod-type light emitting device and rod-type light emitting deviceTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 1729US6092786AGate valveTOKYO ELECTRON LTD·Filed 1998·Granted Jul 25, 2000·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →