Inventor · disambiguated record
Yokio Inazuki
Also filed as: INAZUKI YOKIO
1 granted patent·1 pending application·0 citations·filing 2011–2011
14Inventor score
Technology areasC23C
Top patents by PatentIndex Score
2 records- 0157US8647795B2Sputtering target material, silicon-containing film forming method, and photomask blankKANEKO HIDEO·Filed 2011·Granted Feb 11, 2014·0 cites·5 claims
- 0254US2012138453A1Silicon target for sputtering film formation and method for forming silicon-containing thin filmYOSHIKAWA HIROKI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →