Inventor · disambiguated record
Youbun Ito
Also filed as: ITO YOUBUN
4 granted patents·2 pending applications·120 citations·filing 1998–2004
79Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
6 records- 0187US6159862ASemiconductor processing method and system using C5 F8TOKYO ELECTRON LTD·Filed 1998·Granted Dec 12, 2000·86 cites·12 claims
- 0261US6465359B2Etchant for use in a semiconductor processing method and systemTOKYO ELECTRON LTD·Filed 1999·Granted Oct 15, 2002·22 cites·5 claims
- 0337US6753263B1Etching methodTOKYO ELECTRON LTD·Filed 1999·Granted Jun 22, 2004·8 cites·8 claims
- 0436US2003102087A1Plasma processing apparatus and processing methodFiled 2002·Application pending·0 cites
- 0535US2005103441A1Etching method and plasma etching apparatusFiled 2004·Application pending·0 cites
- 0632US6602435B1Etching methodTOKYO ELECTRON LTD·Filed 1998·Granted Aug 5, 2003·4 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →