Inventor · disambiguated record
Yoshitaka Kitagawa
Also filed as: KITAGAWA YOSHITAKA
2 granted patents·1 pending application·1 citations·filing 2017–2023
30Inventor score
Files withEBARA CORP3
Top patents by PatentIndex Score
3 records- 0164US10361101B2Substrate cleaning apparatus and substrate processing apparatus XEBARA CORP·Filed 2017·Granted Jul 23, 2019·1 cites·8 claims
- 0256US2024207995A1Polishing device and method for adjusting pressure control unitEBARA CORP·Filed 2023·Application pending·0 cites
- 0348US11626299B2Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatusEBARA CORP·Filed 2020·Granted Apr 11, 2023·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →