Inventor · disambiguated record
Yoshitaka Matsuda
Also filed as: MATSUDA YOSHITAKA
8 granted patents·5 pending applications·290 citations·filing 1994–2022
89Inventor score
Top patents by PatentIndex Score
13 records- 0191US6159288AMethod and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·57 cites·10 claims
- 0280US5945161AApparatus and method for supplying process solution to surface of substrate to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·60 cites·21 claims
- 0374US5906860AApparatus for treating a substrate with resist and resist-treating methodTOKYO ELECTRON LTD·Filed 1997·Granted May 25, 1999·49 cites·27 claims
- 0472US6261378B1Substrate cleaning unit and cleaning methodTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·25 claims
- 0568US6451515B2Substrate treating methodTOKYO ELECTRON LTD·Filed 1999·Granted Sep 17, 2002·31 cites·10 claims
- 0668US6398879B1Method and apparatus for cleaning treatmentTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·10 cites·6 claims
- 0764US5395003ACovered airtight containerMARUWA SEISAKUSHO KK·Filed 1994·Granted Mar 7, 1995·40 cites·9 claims
- 0856US2023109353A1Fluorine-containing copolymer compositionKANTO DENKA KOGYO KK·Filed 2021·Application pending·0 cites
- 0954US11667811B2Coating composition excellent in abrasion resistanceKANTO DENKA KOGYO KK·Filed 2020·Granted Jun 6, 2023·0 cites·22 claims
- 1053US2023197475A1Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1141US2020157372A1Fluorine-containing copolymerKANTO DENKA KOGYO KK·Filed 2018·Application pending·0 cites
- 1240US2002187423A1Substrate treating methodFiled 2002·Application pending·0 cites
- 1339US2020157373A1Paint compositionKANTO DENKA KOGYO KK·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →