Inventor · disambiguated record
Yoichi Nakahara
Also filed as: NAKAHARA YOICHI
2 granted patents·2 pending applications·0 citations·filing 2009–2014
22Inventor score
Top patents by PatentIndex Score
4 records- 0145US2009299512A1Semiconductor manufacturing system and methodRENESAS TECH CORP·Filed 2009·Application pending·0 cites
- 0230US9530671B2Etching methodTOKYO ELECTRON LTD·Filed 2014·Granted Dec 27, 2016·0 cites·3 claims
- 0328US9156307B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Oct 13, 2015·0 cites·9 claims
- 0426US2014073113A1Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →