Inventor · disambiguated record
Yoshimasa Ohshima
Also filed as: OHSHIMA YOSHIMASA
53 granted patents·3 pending applications·1,642 citations·filing 1981–2012
99Inventor score
Top patents by PatentIndex Score
56 records- 0197US7248352B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 24, 2007·66 cites·4 claims
- 0297US7098055B2Apparatus and method for testing defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 29, 2006·36 cites·7 claims
- 0396US7940383B2Method of detecting defects on an objectHITACHI LTD·Filed 2009·Granted May 10, 2011·42 cites·20 claims
- 0496US7639350B2Apparatus and method for testing defectsHITACHI LTD·Filed 2007·Granted Dec 29, 2009·25 cites·20 claims
- 0596US6411377B1Optical apparatus for defect and particle size inspectionHITACHI LTD·Filed 1999·Granted Jun 25, 2002·174 cites·29 claims
- 0695US7369223B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2005·Granted May 6, 2008·25 cites·5 claims
- 0794US7061602B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH CORP·Filed 2005·Granted Jun 13, 2006·18 cites·13 claims
- 0894US5274434AMethod and apparatus for inspecting foreign particles on real time basis in semiconductor mass production lineHITACHI LTD·Filed 1991·Granted Dec 28, 1993·218 cites·20 claims
- 0993US7443496B2Apparatus and method for testing defectsHITACHI LTD·Filed 2007·Granted Oct 28, 2008·16 cites·15 claims
- 1093US5463459AMethod and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processHITACHI LTD·Filed 1993·Granted Oct 31, 1995·145 cites·39 claims
- 1192US8013989B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2010·Granted Sep 6, 2011·7 cites·16 claims
- 1292US7037735B2Apparatus and method for testing defectsHITACHI HIGH TECH CORP·Filed 2002·Granted May 2, 2006·43 cites·18 claims
- 1391US7692779B2Apparatus and method for testing defectsHITACHI LTD·Filed 2005·Granted Apr 6, 2010·12 cites·20 claims
- 1491US7417723B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2006·Granted Aug 26, 2008·10 cites·12 claims
- 1591US7262425B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 28, 2007·13 cites·18 claims
- 1691US7177020B2Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processRENESAS TECH CORP·Filed 2005·Granted Feb 13, 2007·15 cites·19 claims
- 1791US6936835B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2002·Granted Aug 30, 2005·34 cites·22 claims
- 1890US6888959B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 3, 2005·38 cites·20 claims
- 1990US6731384B2Apparatus for detecting foreign particle and defect and the same methodHITACHI LTD·Filed 2001·Granted May 4, 2004·44 cites·18 claims
- 2090US5233191AMethod and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production processHITACHI LTD·Filed 1991·Granted Aug 3, 1993·145 cites·14 claims
- 2189US4740079AMethod of and apparatus for detecting foreign substancesHITACHI LTD·Filed 1985·Granted Apr 26, 1988·72 cites·9 claims
- 2288US7426023B2Method and apparatus for detecting defectsHITACHI LTD·Filed 2005·Granted Sep 16, 2008·13 cites·15 claims
- 2388US6597448B1Apparatus and method of inspecting foreign particle or defect on a sampleHITACHI LTD·Filed 2000·Granted Jul 22, 2003·44 cites·20 claims
- 2487US7417721B2Defect detector and defect detecting methodHITACHI LTD·Filed 2003·Granted Aug 26, 2008·20 cites·21 claims
- 2586US8274651B2Method of inspecting a semiconductor device and an apparatus thereofHAMAMATSU AKIRA·Filed 2011·Granted Sep 25, 2012·3 cites·14 claims
- 2686US5135303AMethod of and apparatus for inspecting surface defectsHITACHI LTD·Filed 1991·Granted Aug 4, 1992·39 cites·14 claims
- 2785US7643139B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Jan 5, 2010·8 cites·6 claims
- 2885US7643138B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2008·Granted Jan 5, 2010·5 cites·12 claims
- 2984US7315363B2Inspection method and inspection apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 1, 2008·14 cites·8 claims
- 3082US8040503B2Method of inspecting a semiconductor device and an apparatus thereofHITACHI LTD·Filed 2010·Granted Oct 18, 2011·2 cites·12 claims
- 3182US7586594B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 8, 2009·4 cites·6 claims
- 3281US5225886AMethod of and apparatus for detecting foreign substancesHITACHI LTD·Filed 1990·Granted Jul 6, 1993·54 cites·21 claims
- 3380US8508727B2Defects inspecting apparatus and defects inspecting methodUTO SACHIO·Filed 2012·Granted Aug 13, 2013·2 cites·18 claims
- 3480US7903244B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 8, 2011·3 cites·2 claims
- 3579US8289507B2Method of apparatus for detecting particles on a specimenHAMAMATSU AKIRA·Filed 2011·Granted Oct 16, 2012·2 cites·12 claims
- 3679US7817261B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 19, 2010·4 cites·14 claims
- 3779US7411207B2Method and its apparatus for inspecting particles or defects of a semiconductor deviceHITACHI LTD·Filed 2007·Granted Aug 12, 2008·4 cites·10 claims
- 3879US4922308AMethod of and apparatus for detecting foreign substanceHITACHI LTD·Filed 1987·Granted May 1, 1990·43 cites·12 claims
- 3978US7952700B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2010·Granted May 31, 2011·2 cites·12 claims
- 4078US7768634B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·3 cites·16 claims
- 4177US7332359B2Semiconductor device inspection methodHITACHI LTD·Filed 2002·Granted Feb 19, 2008·20 cites·10 claims
- 4276US4460273ATest apparatus for defects of plateHITACHI LTD·Filed 1981·Granted Jul 17, 1984·30 cites·15 claims
- 4375US7567343B2Method and apparatus for detecting defects on a waferHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 28, 2009·4 cites·8 claims
- 4472US8094295B2Inspection method and inspection apparatusHAMAMATSU AKIRA·Filed 2009·Granted Jan 10, 2012·1 cites·1 claims
- 4571US6894773B2Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication processRENESAS TECH CORP·Filed 2001·Granted May 17, 2005·11 cites·27 claims
- 4670US6650409B1Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same systemHITACHI LTD·Filed 1996·Granted Nov 18, 2003·39 cites·49 claims
- 4769US4614430AMethod of detecting pattern defect and its apparatusHITACHI LTD·Filed 1984·Granted Sep 30, 1986·40 cites·7 claims
- 4863US8269959B2Inspection method and inspection apparatusHAMAMATSU AKIRA·Filed 2012·Granted Sep 18, 2012·0 cites·7 claims
- 4961US7586593B2Inspection method and inspection apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 8, 2009·0 cites·13 claims
- 5059US8228495B2Defects inspecting apparatus and defects inspecting methodUTO SACHIO·Filed 2011·Granted Jul 24, 2012·0 cites·14 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →