Inventor · disambiguated record
Young C. Park
Also filed as: PARK YOUNG C · PARK YOUNG CHANG
8 granted patents·1 pending application·458 citations·filing 1996–2005
91Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0189US5868857ARotating belt wafer edge cleaning apparatusINTEL CORP·Filed 1996·Granted Feb 9, 1999·91 cites·9 claims
- 0288US5861066AMethod and apparatus for cleaning edges of contaminated substratesONTRAK SYSTEMS INC·Filed 1996·Granted Jan 19, 1999·88 cites·18 claims
- 0385US6475293B1Rotating belt wafer edge cleaning apparatusINTEL CORP·Filed 2000·Granted Nov 5, 2002·31 cites·7 claims
- 0484US6334229B1Apparatus for cleaning edges of contaminated substratesLAM RES CORP·Filed 1999·Granted Jan 1, 2002·63 cites·31 claims
- 0584US5725414AApparatus for cleaning the side-edge and top-edge of a semiconductor waferINTEL CORP·Filed 1996·Granted Mar 10, 1998·82 cites·11 claims
- 0679US5901399AFlexible-leaf substrate edge cleaning apparatusINTEL CORP·Filed 1996·Granted May 11, 1999·53 cites·19 claims
- 0773US6092253AFlexible-leaf substrate edge cleaning apparatusINTEL CORP·Filed 1998·Granted Jul 25, 2000·38 cites·16 claims
- 0849US6357071B2Rotating belt wafer edge cleaning apparatusINTEL CORP·Filed 1998·Granted Mar 19, 2002·12 cites·21 claims
- 0939US2006144823A1Etching solution for D-defect evaluation in silicon wafer and evaluation method using the sameKIM YOUNG-HUN·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →