Inventor · disambiguated record
Yoji Sakata
Also filed as: SAKATA YOJI
5 granted patents·4 pending applications·22 citations·filing 2012–2025
76Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0189US9984904B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·5 cites·10 claims
- 0287US9460942B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Oct 4, 2016·7 cites·11 claims
- 0384US9984905B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·3 cites·18 claims
- 0484US9287145B2Substrate treatment system, substrate transfer method, and a non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Mar 15, 2016·7 cites·9 claims
- 0571US2024231232A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0663US2024355644A1Substrate processing system, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0760US2025201586A1Substrate processing system, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0859US11971661B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 30, 2024·0 cites·20 claims
- 0949US2024310740A1Substrate transfer method and substrate transfer apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →