Inventor · disambiguated record
Yoshihiro Shiode
Also filed as: SHIODE YOSHIHIRO
25 granted patents·7 pending applications·186 citations·filing 2001–2024
95Inventor score
Top patents by PatentIndex Score
32 records- 0196US9283720B2Position detection apparatus, imprint apparatus, and position detection methodCANON KK·Filed 2014·Granted Mar 15, 2016·19 cites·9 claims
- 0296US8842294B2Position detection apparatus, imprint apparatus, and position detection methodMINODA KEN·Filed 2012·Granted Sep 23, 2014·25 cites·21 claims
- 0391US10095117B2Imprint apparatusCANON KK·Filed 2016·Granted Oct 9, 2018·4 cites·18 claims
- 0487US9285675B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Mar 15, 2016·6 cites·16 claims
- 0586US9798231B2Imprint apparatus and method of manufacturing articleCANON KK·Filed 2013·Granted Oct 24, 2017·4 cites·14 claims
- 0686US7221434B2Exposure method and apparatusCANON KK·Filed 2006·Granted May 22, 2007·9 cites·7 claims
- 0785US8678808B2Imprint apparatus and article manufacturing methodYOSHIDA SETSUO·Filed 2011·Granted Mar 25, 2014·6 cites·23 claims
- 0885US6633390B2Focus measurement in projection exposure apparatusCANON KK·Filed 2001·Granted Oct 14, 2003·31 cites·48 claims
- 0984US6982786B2Reticle and optical characteristic measuring methodCANON KK·Filed 2002·Granted Jan 3, 2006·24 cites·30 claims
- 1083US9400426B2Imprint apparatusHAMAYA ZENICHI·Filed 2012·Granted Jul 26, 2016·5 cites·9 claims
- 1183US7190443B2Reticle and optical characteristic measuring methodCANON KK·Filed 2002·Granted Mar 13, 2007·17 cites·2 claims
- 1277US7423740B2Reticle and optical characteristic measuring methodCANON KK·Filed 2005·Granted Sep 9, 2008·3 cites·12 claims
- 1376US11400619B2Imprint method and article manufacturing methodCANON KK·Filed 2019·Granted Aug 2, 2022·1 cites·21 claims
- 1474US7499179B2Measurement method and apparatus, exposure apparatus, exposure method, and adjusting methodCANON KK·Filed 2007·Granted Mar 3, 2009·3 cites·11 claims
- 1573US6960415B2Aberration measuring method and projection exposure apparatusCANON KK·Filed 2002·Granted Nov 1, 2005·12 cites·9 claims
- 1672US7826044B2Measurement method and apparatus, and exposure apparatusCANON KK·Filed 2006·Granted Nov 2, 2010·3 cites·3 claims
- 1769US7468798B2System and method for polarization characteristic measurement of optical systems via centroid analysisCANON KK·Filed 2007·Granted Dec 23, 2008·2 cites·9 claims
- 1869US7193713B2Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the sameCANON KK·Filed 2003·Granted Mar 20, 2007·9 cites·16 claims
- 1968US10828808B2Imprint apparatus, imprint method, and method of manufacturing articleCANON KK·Filed 2017·Granted Nov 10, 2020·1 cites·15 claims
- 2067US2024262021A1Measurement method, shaping device, simulator, measurement device, and storage mediumCANON KK·Filed 2024·Application pending·0 cites
- 2162US12399425B2Molding apparatus and article manufacturing methodCANON KK·Filed 2023·Granted Aug 26, 2025·0 cites·10 claims
- 2261US7375805B2Reticle and optical characteristic measuring methodCANON KK·Filed 2006·Granted May 20, 2008·2 cites·6 claims
- 2361US2024219871A1Analysis methodCANON KK·Filed 2024·Application pending·0 cites
- 2453US10705422B2Imprint methodCANON KK·Filed 2017·Granted Jul 7, 2020·0 cites·19 claims
- 2552US11759994B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2020·Granted Sep 19, 2023·0 cites·15 claims
- 2649US9921470B2Imprint method for an imprint apparatus which transfers a pattern onto a substrate by using a moldCANON KK·Filed 2013·Granted Mar 20, 2018·0 cites·12 claims
- 2749US2009086183A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Application pending·0 cites
- 2845US2019285982A1Mold, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2019·Application pending·0 cites
- 2941US2006055915A1Measuring apparatus, test reticle, exposure apparatus and device manufacturing methodSHIODE YOSHIHIRO·Filed 2005·Application pending·0 cites
- 3040US11413651B2Imprint apparatus, operation method of imprint apparatus, and article manufacturing methodCANON KK·Filed 2017·Granted Aug 16, 2022·0 cites·10 claims
- 3139US2011206852A1Imprint apparatus, template of imprint apparatus, and article manufacturing methodCANON KK·Filed 2011·Application pending·0 cites
- 3233US2014118728A1Detection apparatus, lithography apparatus, method of manufacturing article, and detection methodCANON KK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →