Inventor · disambiguated record
Yoshihide Tada
Also filed as: TADA YOSHIHIDE
11 granted patents·7 pending applications·362 citations·filing 1993–2009
91Inventor score
Top patents by PatentIndex Score
18 records- 0192US5391506AManufacturing method for semiconductor devices with source/drain formed in substrate projection.KAWASAKI STEEL CO·Filed 1993·Granted Feb 21, 1995·213 cites·5 claims
- 0287US5365083ASemiconductor device of band-to-band tunneling typeKAWASAKI STEEL CO·Filed 1994·Granted Nov 15, 1994·81 cites·16 claims
- 0386US6897149B2Method of producing electronic device materialTOKYO ELECTRON LTD·Filed 2002·Granted May 24, 2005·24 cites·34 claims
- 0485US7217659B2Process for producing materials for electronic deviceTOKYO ELECTRON LTD·Filed 2005·Granted May 15, 2007·5 cites·44 claims
- 0574US8021987B2Method of modifying insulating filmTOKYO ELECTRON LTD·Filed 2009·Granted Sep 20, 2011·3 cites·24 claims
- 0674US7662236B2Method for forming insulation filmTOKYO ELECTRON LTD·Filed 2008·Granted Feb 16, 2010·3 cites·8 claims
- 0773US6821566B2Method and apparatus for forming insulating film containing silicon oxy-nitrideTOKYO ELECTRON LTD·Filed 2002·Granted Nov 23, 2004·15 cites·20 claims
- 0872US7655574B2Method of modifying insulating filmTOKYO ELECTRON LTD·Filed 2005·Granted Feb 2, 2010·3 cites·14 claims
- 0968US7446052B2Method for forming insulation filmTOKYO ELECTRON LTD·Filed 2003·Granted Nov 4, 2008·10 cites·18 claims
- 1063US2007218687A1Process for producing materials for electronic deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1158US2010096707A1Method for Forming Insulation FilmTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1252US2007224837A1Method for producing material of electronic deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1350US6933249B2Method of fabricating semiconductor deviceTOKYO ELECTRON LTD·Filed 2002·Granted Aug 23, 2005·3 cites·9 claims
- 1449US7622402B2Method for forming underlying insulation filmTOKYO ELECTRON LTD·Filed 2003·Granted Nov 24, 2009·2 cites·19 claims
- 1549US2005233599A1Method for producing material of electronic deviceMAKOTO ANDO·Filed 2005·Application pending·0 cites
- 1640US2004142577A1Method for producing material of electronic deviceFiled 2002·Application pending·0 cites
- 1739US2004253839A1Semiconductor manufacturing apparatus and heat treatment methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1837US2005227500A1Method for producing material of electronic deviceTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →