Inventor · disambiguated record
Yonatan Vaknin
Also filed as: VAKNIN YONATAN
7 granted patents·3 pending applications·12 citations·filing 2021–2024
77Inventor score
Files withKLA CORP10
Top patents by PatentIndex Score
10 records- 0194US12032300B2Imaging overlay with mutually coherent oblique illuminationKLA CORP·Filed 2022·Granted Jul 9, 2024·2 cites·23 claims
- 0293US11800212B1Multi-directional overlay metrology using multiple illumination parameters and isolated imagingKLA CORP·Filed 2022·Granted Oct 24, 2023·5 cites·31 claims
- 0392US12001148B2Enhancing performance of overlay metrologyKLA CORP·Filed 2023·Granted Jun 4, 2024·2 cites·26 claims
- 0491US12066322B2Single grab overlay measurement of tall targetsKLA CORP·Filed 2022·Granted Aug 20, 2024·2 cites·40 claims
- 0583US11592755B2Enhancing performance of overlay metrologyKLA CORP·Filed 2021·Granted Feb 28, 2023·1 cites·30 claims
- 0672US2024337952A1System and method for determining overlay measurement of a scanning targetKLA CORP·Filed 2023·Application pending·0 cites
- 0765US12399435B2Grating-over-grating overlay measurement with parallel color per layerKLA CORP·Filed 2023·Granted Aug 26, 2025·0 cites·23 claims
- 0865US2025257992A1Metrology measurements on small targets with control of zero-order side lobesKLA CORP·Filed 2024·Application pending·0 cites
- 0957US2022357674A1Oblique illumination for overlay metrologyKLA CORP·Filed 2022·Application pending·0 cites
- 1053US12422363B2Scanning scatterometry overlay metrologyKLA CORP·Filed 2022·Granted Sep 23, 2025·0 cites·51 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →