Inventor · disambiguated record
Yoshikiyo Yui
Also filed as: YUI YOSHIKIYO
22 granted patents·430 citations·filing 1986–2021
96Inventor score
Top patents by PatentIndex Score
22 records- 0195US6835937B1Correcting method for correcting exposure data used for a charged particle beam exposure systemCANON KK·Filed 2000·Granted Dec 28, 2004·67 cites·15 claims
- 0291US6515409B2Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing methodCANON KK·Filed 2000·Granted Feb 4, 2003·39 cites·22 claims
- 0391US6483120B1Control system for a charged particle exposure apparatusCANON KK·Filed 2000·Granted Nov 19, 2002·48 cites·27 claims
- 0490US6667486B2Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the sameHITACHI LTD·Filed 2002·Granted Dec 23, 2003·34 cites·8 claims
- 0589US6593686B1Electron gun and electron beam drawing apparatus using the sameCANON KK·Filed 2000·Granted Jul 15, 2003·31 cites·17 claims
- 0684US7126140B2Multi-electron beam exposure method and apparatusADVANTEST CORP·Filed 2005·Granted Oct 24, 2006·7 cites·9 claims
- 0780US6559463B2Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing methodCANON KK·Filed 2000·Granted May 6, 2003·16 cites·18 claims
- 0879US7067830B2Multi-electron beam exposure method and apparatusADVANTEST CORP·Filed 2003·Granted Jun 27, 2006·13 cites·9 claims
- 0978US6903352B2Charged-particle beam exposure apparatus, charged-particle beam exposure method, control data determination method, and device manufacturing method using this methodCANON KK·Filed 2000·Granted Jun 7, 2005·13 cites·26 claims
- 1078US6466301B1Transfer apparatus and transfer methodCANON KK·Filed 2000·Granted Oct 15, 2002·16 cites·41 claims
- 1176US6777697B2Charged-particle beam exposure apparatus and device manufacturing method using the sameCANON KK·Filed 2000·Granted Aug 17, 2004·19 cites·25 claims
- 1274US7608844B2Charged particle beam drawing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 27, 2009·3 cites·21 claims
- 1373US8754382B2Charged particle beam drawing apparatus and method of manufacturing articleCANON KK·Filed 2012·Granted Jun 17, 2014·2 cites·10 claims
- 1473US8716672B2Charged particle optical system, drawing apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted May 6, 2014·2 cites·28 claims
- 1572US5107275AExposure control systemCANON KK·Filed 1990·Granted Apr 21, 1992·35 cites·14 claims
- 1669US5053614AExposure control method and apparatus compensating for detection of offset from a measured valueCANON KK·Filed 1990·Granted Oct 1, 1991·33 cites·17 claims
- 1761US4714331AMethod and apparatus for automatic focusingCANON KK·Filed 1986·Granted Dec 22, 1987·14 cites·34 claims
- 1860US6455211B1Pattern transfer method and apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Sep 24, 2002·19 cites·40 claims
- 1958US6992307B2Electron beam source and electron beam exposure apparatus employing the electron beam sourceHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 31, 2006·3 cites·6 claims
- 2055US6741732B2Exposure method and device manufacturing method using this exposure methodCANON KK·Filed 1998·Granted May 25, 2004·11 cites·20 claims
- 2145US12324651B2Acoustic-wave measuring device, matching-material bag, matching gel, separation film, and acoustic-wave measurement methodLUXONUS INC·Filed 2021·Granted Jun 10, 2025·0 cites·16 claims
- 2240US4713675AExposure apparatusCANON KK·Filed 1986·Granted Dec 15, 1987·5 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →