Inventor · disambiguated record
Yutaka Akaike
Also filed as: AKAIKE YUTAKA
16 granted patents·5 pending applications·104 citations·filing 1996–2021
91Inventor score
Top patents by PatentIndex Score
21 records- 0182US10307929B2Punching apparatusCANON FINETECH NISCA INC·Filed 2017·Granted Jun 4, 2019·2 cites·5 claims
- 0278US11590672B2Sheet punching apparatusCANON FINETECH NISCA INC·Filed 2017·Granted Feb 28, 2023·2 cites·7 claims
- 0376US6634245B1Drivingly rotatable mechanism of specimen loading table and specimen loading mechanismTOKYO ELECTRON LTD·Filed 2000·Granted Oct 21, 2003·19 cites·13 claims
- 0475US7812627B2Test deviceTOKYO ELECTRON LTD·Filed 2008·Granted Oct 12, 2010·5 cites·19 claims
- 0570US8082977B2Ceramic mounting for wafer apparatus with thermal expansion featureAKAIKE YUTAKA·Filed 2007·Granted Dec 27, 2011·5 cites·9 claims
- 0669US7580109B2Substrate supporting unit, and substrate temperature control apparatus and methodTOKYO ELECTRON LTD·Filed 2006·Granted Aug 25, 2009·3 cites·15 claims
- 0757US11776829B2Dummy waferTOKYO ELECTRON LTD·Filed 2021·Granted Oct 3, 2023·0 cites·8 claims
- 0856US6317647B1AlignerTOKYO ELECTRON LTD·Filed 1999·Granted Nov 13, 2001·23 cites·10 claims
- 0953US7525695B2Image reading apparatusNISCA CORP·Filed 2004·Granted Apr 28, 2009·5 cites·10 claims
- 1053US5912555AProbe apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jun 15, 1999·17 cites·17 claims
- 1152US6307390B1Aligner and method for inspecting semiconductor wafer using shellTOKYO ELECTRON LTD·Filed 1999·Granted Oct 23, 2001·17 cites·9 claims
- 1251US11543445B2Inspection apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 3, 2023·0 cites·8 claims
- 1349US7994809B2Transfer mechanism for target object to be inspectedTOKYO ELECTRON LTD·Filed 2009·Granted Aug 9, 2011·0 cites·6 claims
- 1448US2021156890A1Stage and inspection apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1545US9885747B2Substrate inspection apparatus and substrate temperature control methodTOKYO ELECTRON LTD·Filed 2014·Granted Feb 6, 2018·0 cites·13 claims
- 1645US2022015193A1Method for controlling temperature of substrate support and inspection apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1743US11226366B2Wafer inspection device and maintenance method for sameTOKYO ELECTRON LTD·Filed 2016·Granted Jan 18, 2022·0 cites·6 claims
- 1838US2011157666A1Image reading apparatusNISCA CORP·Filed 2010·Application pending·0 cites
- 1937US6262570B1Probe apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·6 cites·4 claims
- 2035US2001013772A1Chuck device and chuck methodFiled 2000·Application pending·0 cites
- 2126US2002011854A1Probe deviceFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →