Inventor · disambiguated record
Yu-Feng Chang
Also filed as: CHANG YU · CHANG YU-FENG
4 granted patents·3 pending applications·50 citations·filing 1998–2009
75Inventor score
Top patents by PatentIndex Score
7 records- 0181US7381266B1Sapphire crystal growth methodCHANG YU-FENG·Filed 2006·Granted Jun 3, 2008·9 cites·14 claims
- 0273US8216640B2Method of making showerhead for semiconductor processing apparatusCHAO BEN-SON·Filed 2009·Granted Jul 10, 2012·7 cites·21 claims
- 0366US6156079AWindow support member for a semiconductor processing systemFiled 1998·Granted Dec 5, 2000·31 cites·22 claims
- 0445US6500263B2Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levelsAPPLIED MATERIALS INC·Filed 2001·Granted Dec 31, 2002·3 cites·29 claims
- 0542US2010107841A1Worktable of a table sawDURQ MACHINERY CORP·Filed 2008·Application pending·0 cites
- 0641US2008006530A1Capillary Flow Control in a Flow ChannelWINARTA HANDANI·Filed 2006·Application pending·0 cites
- 0741US2008160472A1Sinter furnace for sapphire crystal growthCHANG YU-FENG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →