Inventor · disambiguated record
Yukihiko Esaki
Also filed as: ESAKI YUKIHIKO
13 granted patents·1 pending application·363 citations·filing 2000–2005
94Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD14
Top patents by PatentIndex Score
14 records- 0193US6676757B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2000·Granted Jan 13, 2004·60 cites·12 claims
- 0290US6383948B1Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2000·Granted May 7, 2002·57 cites·19 claims
- 0388US6537373B1Method of forming film and apparatus thereofTOKYO ELECTRON LTD·Filed 2000·Granted Mar 25, 2003·36 cites·18 claims
- 0485US6616760B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Sep 9, 2003·28 cites·14 claims
- 0584US6695922B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 24, 2004·32 cites·11 claims
- 0684US6599366B1Substrate processing unit and processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Jul 29, 2003·32 cites·12 claims
- 0783US6872256B2Film forming unitTOKYO ELECTRON LTD·Filed 2003·Granted Mar 29, 2005·25 cites·10 claims
- 0883US6514344B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 4, 2003·28 cites·39 claims
- 0982US7087118B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2005·Granted Aug 8, 2006·6 cites·9 claims
- 1081US6605153B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 12, 2003·26 cites·8 claims
- 1175US6716478B2Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Apr 6, 2004·17 cites·7 claims
- 1271US6936107B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2003·Granted Aug 30, 2005·11 cites·21 claims
- 1359US6933015B2Method of forming filmTOKYO ELECTRON LTD·Filed 2003·Granted Aug 23, 2005·5 cites·12 claims
- 1436US2001003966A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →