Inventor · disambiguated record
Yujie Geng
Also filed as: GENG YUJIE
4 granted patents·2 pending applications·4 citations·filing 2016–2023
61Inventor score
Files withBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD5STATE GRID SHANDONG ELECTRIC POWER RES INSTITUTE1
Top patents by PatentIndex Score
6 records- 0182US10640862B2Method for forming film and method for forming aluminum nitride filmBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2016·Granted May 5, 2020·2 cites·18 claims
- 0272US10643843B2Film forming method and aluminum nitride film forming method for semiconductor apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2017·Granted May 5, 2020·2 cites·20 claims
- 0360US2024191340A1Bias magnetic field control method, control device, and semiconductor process equipmentBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2023·Application pending·0 cites
- 0455US11315768B2Loading apparatus and physical vapor deposition apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2018·Granted Apr 26, 2022·0 cites·18 claims
- 0549US11954210B2Hierarchical health index evaluation method and apparatus for intelligent substationSTATE GRID SHANDONG ELECTRIC POWER RES INSTITUTE·Filed 2021·Granted Apr 9, 2024·0 cites·16 claims
- 0647US2022228253A1Bias magnetic field control method, magnetic thin film deposition method,chamber, and apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →